Polydnethyl methacrylate as masking material for microelectromechanical system (MEMS) fabrication

Journal of Applied Polymer Science

Volumn 102, Issue 3, 2006, Pages 2094-2098

  Bodas, Dhananjay S ^a   Gangal, S A ^a  

^a UNIVERSITY OF PUNE   (India)

Author keywords

Direct current (dc) sputtering; Masking materials; Poly(methyl methacrylate); Potassium hydroxide; X ray photoelectron spectroscopy

Indexed keywords

CONTACT ANGLE; ETCHING; MASKS; MICROELECTROMECHANICAL DEVICES; SPUTTER DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

DIRECT CURRENT (DC) SPUTTERING; MASKING LAYERS; MASKING MATERIALS; POTASSIUM HYDROXIDE;

POLYMETHYL METHACRYLATES;

ADHESION; ANISOTROPY; ELECTRONICS; ETCHING; POLYMETHYL METHACRYLATE; SILICON;

EID: 33750358093     PISSN: 00218995     EISSN: 10974628     Source Type: Journal    
DOI: 10.1002/app.24091     Document Type: Article

References (19)

1. Scidel, H.; Csepregi, L.; Heuberger, A.; Baumgartel, H. J Electrochem Soc 1990, 137, 361.
2. Ilie, M.; Marculescu, B.; Moldovan, N.; Nastase, N.; Olteanu, M. Proc SPIE Mater Dev Character Micromach 1998, 3512, 422.
3. Yoshida, A.; Uchida, M.; Ishizaka, M.; Wakahara, M. Presented at the Indo-Japanese Workshop on Microsystems Technology, New Delhi, India, 2000.
4. Bodas, D.; Dabhade, R.; Patil, S.; Gangal, S. Proc IEEE 2001, 51.
5. Yamguchi, D.; Katoh, T.; Sato, Y.; Ikeda, S.; Hirose, H.; Aoki, A.; Iida, M.; Oshima, A.; Tabata, Y.; Washio, M. Macromol Symp 2002, 181, 201.
6. Yoshida, A.; Matsumoto, E.; Yamada, H.; Okada, H.; Wakahara, A. Nucl Instrum Methods Phys Res 2003, B199, 370.
7. Normand, P.; Beltsios, K.; Tserepi, A.; Aidinis, K.; Tsoukalas, D.; Cardinaud, C. Microelectron Eng 2002, 61-62, 895.
8. Bodas, D.; Gangal, S. Mater Lett 2005, 59, 2903.
9. Rai Choudhary, R. Microlithography, Micromachining and Microfabrication; SPIE Press: Bellingham, WA, 1997; Vol. I.
10. Yosoniya, R. Adhesion and Bonding in Composites; Marcel Dekker: New York, 1989.
11. Yu, Q.; Reddy, C.; Meives, M.; Yasuda, H. J Appl Polym Sci 1999, 37, 4432.
12. Good, R. J Adhes Sci Technol 1992, 6, 1269.
13. Schulz, U.; Munzert, P.; Kaiser, N. Surf Coat Technol 2001, 142-144, 507.
14. Silversteen, R.; Webster, F. Spectroscopic Identification of Organic Compounds; Wiley: New York, 2002.
15. Rai Choudhary, P. Microlithography, Micromachining and Microfabrication; SPIE Press: Bellingham, WA, 1997; Vol. II.
16. Briggs, D.; Seah, M. Practical Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy; Wiley: New York, 1983.
17. Groning, P.; Collaud, M.; Dietler, G.; Schlapbach, L. J Appl Phys 1994, 79, 887.
18. Ben Amor, S.; Baud, G.; Jacquet, M.; Nanse, G.; Fioux, P.; Nardin, M. Appl Surf Sci 2000, 153, 172.
19. Bodas, D.; Gangal, S. J Micromech Microeng 2005, 15, 802.