Microfabrication of high quality polytetrafluoroethylene films by synchrotron radiation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 199, Issue , 2003, Pages 370-374

  Yoshida, A ^a   Matsumoto, E ^a   Yamada, H ^a   Okada, H ^a   Wakahara, A ^a  

^a TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Etching; PTFE; Spin coat; Synchrotron radiation; Thin films

Indexed keywords

CHEMICAL BONDS; DEPOSITION; ETCHING; SPIN COATING; SYNCHROTRON RADIATION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

MICROFABRICATION;

POLYTETRAFLUOROETHYLENES;

EID: 0037244165     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)01570-7     Document Type: Article

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