Nucleation characteristics of directly electrodeposited copper on TiN

Journal of the Electrochemical Society

Volumn 153, Issue 9, 2006, Pages

  Kim, Sunjung ^a   Duquette, David J ^a,b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; DIFFUSION; ELECTROCHEMISTRY; ELECTRODEPOSITION; ELECTROLYTES; NUCLEATION; PH EFFECTS; SOLUTIONS;

COPPER SEED LAYER; DIFFUSION BARRIER SURFACE; ELECTRODEPOSITED COPPER;

TITANIUM NITRIDE;

EID: 33750141291     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2219712     Document Type: Article

References (15)

1. P. C. Andricacos, C. Uzoh, J. O. Dukovic, J. Horkans, and H. Deligianni, IBM J. Res. Dev, 42, 567 (1998).
2. R. Ravikumar, H. Cichy, R. G. Filippi, E. W. Kiewra, D. L. Rath, and G. Stojakovic, in Proceedings of IITC 1999, IEEE, p. 146 (1999).
3. R. F. Schnabel, D. Dobuzinsky, J. Gambino, K. P. Muller, F. Wang, D. C. Perng, and H. Palm, Microelectron. Eng., 37/38, 59 (1997).
4. T. Licata, M. Okazaki, M. Ronay, W. Landers, H. Aochi, R. Filippi, D. Restaino, D. Knorr, and J. Ryan, in Proceedings of VMIC 1995, IEEE, p. 596 (1995).
5. C. K. Hu and J. M. E. Harper, Mater. Chem. Phys., 52, 5 (1998).
6. K. M. Takahashi, J. Electrochem. Soc., 147, 1414 (2000).
7. S.-H. Kim, D.-S. Chung, K.-C. Park, K.-B. Kim, and S.-H. Min, J. Electrochem. Soc., 146, 1455 (1999).
8. G. Oskam, P. M. Vereeckem, and P. C. Searson, J. Electrochem. Soc., 146, 1436 (1999).
9. A. Radisic, J. G. Long, P. M. Hoffmann, and P. C. Searson, J. Electrochem. Soc., 148, C41 (2001).
10. M. Pourbaix, Atlas of Electrochemical Equilibria in Aqueous Solutions, NACE International, Houston, TX (1974).
11. J. O'M. Bockris and A. K. N. Reddy, Modern Electrochemistry 25, Kluwer Academic/Plenum Publishers, New York (2000).
12. J. M. Atkinson, R. D. Granata, H. Leidheiser, Jr., and D. G. McBride, IBM J. Res. Dev., 29, 27 (1985).
13. B. Scharifker and G. Hills, Electrochim. Acta, 28, 879 (1983).
14. B. Scharifker and J. Mostany, J. Electroanal. Chem. Interfacial Electrochem., 177, 13 (1984).
15. G. Gunawardena, G. Hills, I. Montenegro, and B. Scharifker, J. Electroanal. Chem. Interfacial Electrochem., 138, 225 (1982).