Wafer-level transfer of thermo-piezoelectric Si3N4 cantilever array on a CMOS circuit for high density probe-based data storage

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 922-925

  Kim, Young Sik ^a   Nam, Hyo Jin ^a   Jang, SeongSoo ^a   Lee, Caroline Sunyong ^a   Jin, Won Hyeog ^a   Cho, Il Joo ^a   Bu, Jong Uk ^a   Chang, Sun Il ^b   Yoon, Euisik ^b  

^a LG Electronics Inc   (South Korea)

^b UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DATA STORAGE EQUIPMENT; SILICON NITRIDE; SILICON WAFERS;

CANTILEVER ARRAYS; PIEZOELECTRIC SENSORS; WAFER-LEVEL CANTILEVER TRANSFER;

PIEZOELECTRIC DEVICES;

EID: 33750129329     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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