100×100 thermo-piezoelectric cantilever array for SPM nano-data-storage application

Sensors and Materials

Volumn 17, Issue 2, 2005, Pages 57-63

  Kim, Young Sik ^a   Lee, Caroline Sunyong ^a   Jin, Won Hyeog ^a   Jang, SeongSoo ^a   Nam, Hyo Jin ^a   Bu, Jong Uk ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

Piezoelectric sensor; PZT thin film; SPM based data storage; Thermo piezoelectric cantilever

Indexed keywords

EID: 17744374618     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (5)

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