Integrated nitride cantilever array with Si heaters and piezoelectric detectors for nano-data-storage application

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 247-250

  Nam, Hyo Jin ^a   Kim, Young Sik ^a   Lee, Caroline Sunyong ^a   Jin, Won Hyeog ^a   Jang, Seongsoo ^a   Cho, Il Joo ^a   Bu, Jong Uk ^a  

^a LG Electronics Inc   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

INDENTATION; MICROSCOPIC EXAMINATION; PIEZOELECTRIC DEVICES; POLYMETHYL METHACRYLATES; SENSORS; SILICON;

INTEGRATED NITRIDE CANTILEVER ARRAYS; MECHANICAL STABILITY; PIEZOELECTRIC SENSORS; POLING;

MICROELECTRONICS;

EID: 26844545513     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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