Optical sensing in a directional MEMS microphone inspired by the ears of the parasitoid fly, Ormia Ochracea

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 614-617

  Cui, Weili ^a   Bicen, Baris ^b   Hall, Neal ^c   Jones, Stephen A ^a   Degertekin, F Levent ^b   Miles, Ronald N ^a  

^a BINGHAMTON UNIVERSITY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HINGES; INTEGRATED OPTICS; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; MICROPHONES; OPTOELECTRONIC DEVICES;

INTER-DIGITATED FINGERS; MINIATURE MICROPHONES; OPTICAL INTERFEROMETRIC DETECTION;

OPTICAL SENSORS;

EID: 33750099837     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. A. Mason, M. Oshinsky, and R.R. Hoy, "Hyperacute directional hearing in a microscale auditory system," Nature, 2001.
2. R. N. Miles, D. Robert, and R. R. Hoy, "Mechanically Coupled Ears for Directional Hearing in the Parasitoid Fly Ormia ochracea," Journal of the Acoustical Society of America, 98, pp. 3059-3070, 1995.
3. R. Miles, S. Sundermurthy, C. Gibbons, D. Robert, and R. Hoy, "Differential Microphone," US Patent No. 9,788,796, September 7, 2004.
4. G.G. Yaralioglu, A. Atalar, S.R. Manalis and C.F. Quate, "Analysis and design of an interdigital cantilever as a displacement sensor," J. Appl. Phys., 83, pp. 7705-15, 1998.
5. 3 interferometric accelerometer with nano-g resolution," J. Microelectromechanical Systems, 11, pp. 182-7, 2002.
6. N.A. Hall and F.L. Degertekin, "An Integrated Optical Interferometric Detection Method for Micromachined Capacitive Acoustic Transducers," Appl. Phys. Lett., 80, pp. 3859-61, 2002.
7. W. Lee, N. A. Hall, Z. Zhou, and F. L. Degertekin, "Fabrication and Characterization of a Micromachined Acoustic Sensor with Integrated Optical Readout," IEEE J. Selected Topics on Quantum Electronics, 10, pp. 643-51, 2004.
8. N.A. Hall, B. Bicen, W. Lee, K. Jeelani, S. Qureshi, M. Okandan, and F.L. Degertekin, "Micromachined Microphones with Diffraction-Based Optical Displacement Detection," Journal of the Acoustical Society of America (in press) 2005.