A white-light profiling algorithm adopting the multiwavelength interferometric technique

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5531, Issue , 2004, Pages 244-249

  Hsu, Hua Chen ^a   Tung, Chi Hong ^a   Kao, Ching Fen ^a   Chang, Calvin C ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Fourier Transform; Multi wavelength phase unwrapping; Surface profile; White light interferometry

Indexed keywords

ALGORITHMS; CHARGE COUPLED DEVICES; FOURIER TRANSFORMS; LIGHT SOURCES; MIRRORS; PHASE SHIFT; TOMOGRAPHY;

FOURIER-TRANSFORMS; MULTI-WAVELENGTH PHASE UNWRAPPING; SURFACE PROFILE; WHITE-LIGHT INTERFEROMETRY;

HOLOGRAPHIC INTERFEROMETRY;

EID: 15744364608     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.559251     Document Type: Conference Paper

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