The use of model data to characterize depth profile generation from angle resolved XPS

AIP Conference Proceedings

Volumn 788, Issue , 2005, Pages 112-118

  Mack, P ^a   McIntosh, B J ^a   White, R G ^a   Wolstenholme, J ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

Angle resolved XPS; Depth resolution; Dielectric films

Indexed keywords

EID: 33749663455     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2062947     Document Type: Conference Paper

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