Optical emission spectra related to microstructures of diamond film deposited by plasma enhanced chemical vapor deposition

Key Engineering Materials

Volumn 321-323 II, Issue , 2006, Pages 1691-1694

  Noda, Mikio ^a   Umeno, Masayoshi ^a   Kim, Hee Joon ^b  

^a CHUBU UNIVERSITY   (Japan)

^b TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Diamond Film; Microstructure; Optical Emission Spectrum; Plasma CVD

Indexed keywords

CHARGE COUPLED DEVICES; LIGHT EMISSION; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SENSORS; SPECTROMETERS;

CRYSTALLINE QUALITY; DEPOSITION RATES; OPTICAL EMISSION SPECTRA;

DIAMOND FILMS;

EID: 33749456790     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-412-x.1691     Document Type: Conference Paper

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