X-ray and AFM studies of ultrathin films for EUV and soft X-ray applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3738, Issue , 1999, Pages 387-393

  Asadchikov, Victor E ^a   Duparre, Angela ^a   Kozhevnikov, Igor V ^a   Krivonosov, Yury S ^a   Sagitov, Spartak I ^a  

^a SHUBNIKOV INSTITUTE OF CRYSTALLOGRAPHY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; INTERFACES (MATERIALS); MIRRORS; OPTICAL CORRELATION; OPTICAL FILMS; OPTICAL MULTILAYERS; SUBSTRATES; ULTRATHIN FILMS; X RAY SCATTERING;

SUBSTRATE MICROTOPOGRAPHY;

OPTICAL COATINGS;

EID: 0032646620     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)