Poly-silicon thin films by aluminium induced crystallisation of microcrystalline silicon

Vacuum

Volumn 81, Issue 3, 2006, Pages 272-278

  Ekanayake, G ^a   Reehal, H S ^a  

^a LONDON SOUTH BANK UNIVERSITY   (United Kingdom)

Author keywords

Crystallisation; Si films; Solar cells

Indexed keywords

ALUMINUM; ANNEALING; CRYSTALLIZATION; ELECTRON CYCLOTRON RESONANCE; GRAIN SIZE AND SHAPE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SILICON WAFERS; SOLAR CELLS; SURFACE ROUGHNESS;

ELECTRON CYCLOTRON RESONANCE PLASMA-ENHANCED CHEMICAL VAPOUR DEPOSITION (ECR-PECVD); MICROCRYSTALLINE SILICON; POLYSILICON THIN FILMS;

THIN FILMS;

EID: 33749153200     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.03.031     Document Type: Article

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