MEMS design for fabrication

Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Volumn , Issue , 2005, Pages 110-112

  Sadek, K ^a   Moussa, W ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; CODES (STANDARDS); COMPUTER SIMULATION; COST ACCOUNTING; PARAMETER ESTIMATION; PRODUCT DESIGN;

COMPUTATIONAL COST; MATERIAL CHARACTERIZATION; MICRO GAS SENSOR; MICROFABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 33749056162     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2005.67     Document Type: Conference Paper

References (7)

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