Identification of material and geometrical parameters for microstructures by dynamic finite element model updating

Microsystem Technologies

Volumn 12, Issue 8, 2006, Pages 736-745

  Chen, Kun Nan ^a   Gau, Wei Hsin ^b   Hu, Yuh Chung ^b  

^a TUNG NAN INSTITUTE OF TECHNOLOGY   (Taiwan)

^b HUAFAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; FINITE ELEMENT METHOD; GEOMETRY; OPTIMIZATION; PARAMETER ESTIMATION; SILICON NITRIDE; VECTORS;

ERROR VECTOR; GEOMETRICAL PARAMETERS; SEM IMAGES; SINGLE-CRYSTALLINE SILICON WAFER;

MICROSTRUCTURE;

EID: 33744530786     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0110-6     Document Type: Article

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