Improved determination of the gas flow rate for UHV and leak metrology with laser refractometry

Measurement Science and Technology

Volumn 17, Issue 10, 2006, Pages 2767-2772

  Hedlund, E ^a   Pendrill, L R ^b,c  

^a UPPSALA UNIVERSITY   (Sweden)

^b SP TECHNICAL RESEARCH INSTITUTE OF SWEDEN   (Sweden)

^c Box 535   (Sweden)

Author keywords

Gas flow; Laser refractometry; Metrology; Throughput; UHV

Indexed keywords

FLOW MEASUREMENT; FLOWMETERS; GAS DYNAMICS; MEASUREMENT THEORY; VACUUM; VACUUM GAGES;

GAS DENSITY; GAS FLOW; GAS LEAK; LASER REFRACTOMETRY;

FLOW OF FLUIDS;

FLOW MEASUREMENT; FLOW OF FLUIDS; FLOWMETERS; GAS DYNAMICS; MEASUREMENT THEORY; VACUUM; VACUUM GAGES;

EID: 33749030993     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/10/031     Document Type: Conference Paper

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