Precision gas flowmeter for vacuum calibration

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 747-752

  Levine, P D ^a   Sweda, J R ^a  

^a LOCKHEED MARTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009347751     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580814     Document Type: Article

References (4)

1. P. D. Levine and J. R. Sweda, J. Vac. Sci. Technol. A 14, 1297 (1996).
2. S. Dittmann, High Vacuum Standard and Its Use NIST Special Publication 250-34, March 1989.
3. P. Clausing, Ann. Phys. 12, 961 (1932); English translation appears in J. Vac. Sci. Technol. 8, 636 (1971).
4. P. Clausing, Ann. Phys. 12, 961 (1932); English translation appears in J. Vac. Sci. Technol. 8, 636 (1971).