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Volumn 39, Issue 6, 2002, Pages 519-529
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A new fully automated gas flowmeter at the PTB for flow rates between 10-13 mol/s and 10-6 mol/s
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC CONDUCTIVITY OF SOLIDS;
FLOW OF FLUIDS;
PRESSURE EFFECTS;
TEMPERATURE;
THERMAL EFFECTS;
ULTRAHIGH VACUUM;
VACUUM PUMPS;
MOLAR FLOW RATES;
PHYSIKALISCH-TECHNISCHE BUNDESANSTALT;
ULTRAHIGH VACUUM PUMPS;
GAS METERS;
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EID: 0036973438
PISSN: 00261394
EISSN: None
Source Type: Journal
DOI: 10.1088/0026-1394/39/6/2 Document Type: Article |
Times cited : (43)
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References (9)
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