Dependence of crystal structure and work function of WNX films on the nitrogen content

Applied Physics Letters

Volumn 89, Issue 12, 2006, Pages

  Jiang, Pei Chuen ^a   Lai, Yi Sheng ^a   Chen, J S ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ELECTRIC POTENTIAL; GRAIN SIZE AND SHAPE; NITROGEN; SILICA; TUNGSTEN COMPOUNDS;

CRYSTAL PHASE; FACE CENTERED CUBIC W; FLATBAND VOLTAGE; GRAIN SIZE;

THIN FILMS;

EID: 33748970897     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2349313     Document Type: Article

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