Effects of hydrogen on poly- and nano-crystallization of a-Si:H prepared by RF magnetron sputtering

Journal of Crystal Growth

Volumn 295, Issue 2, 2006, Pages 119-123

  Seo, Ji Min ^a   Jeong, Min Chang ^a   Myoung, Jae Min ^a  

^a Yonsei University   (South Korea)

Author keywords

A1. Inductive coupled plasma; A1. RF magnetron sputtering; B1. Nanocrystalline silicon; B1. Polycrystalline silicon; B1. Silicon hydrogen bonds

Indexed keywords

AMORPHOUS SILICON; CRYSTALLIZATION; HYDROGEN; INDUCTIVELY COUPLED PLASMA; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS;

NANOCRYSTALLINE SILICON; RF MAGNETRON SPUTTERING; SILICON-HYDROGEN BONDS; SUBSTRATE SURFACES;

POLYSILICON;

EID: 33748952965     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.07.028     Document Type: Article

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