Formation of Ti and TiN ultra-thin films on Si by ion beam sputter deposition

Surface Science

Volumn 600, Issue 18, 2006, Pages 3766-3769

  Styervoyedov, A ^a   Farenik, V ^a,b  

^a Scientific Center of Physical Technologies Kharkiv   (Ukraine)

^b V N KARAZIN KHARKIV NATIONAL UNIVERSITY   (Ukraine)

Author keywords

Sputter deposition; Titanium; Titanium nitride; X ray photoelectron spectroscopy (XPS)

Indexed keywords

ELECTRON EMISSION; ION BEAM ASSISTED DEPOSITION; RADIATION; SILICON; SPUTTER DEPOSITION; TITANIUM NITRIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

AUGER ELECTRONS; ELEMENTAL COMPOSITION; ION BEAM SPUTTERING; SILICON SUBSTRATES;

ULTRATHIN FILMS;

EID: 33748922073     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.01.080     Document Type: Article

References (12)

1. Klemberg-Sapieha J.E., et al. Appl. Opt. 43 13 (2004) 2670
2. Tiwari P., et al. Appl. Phys. Lett. 65 21 (1994) 2693
3. Wang H., Tiwari A., Kvit A., Zhang X., and Narayanet J. Appl. Phys. Lett. 80 (2002) 2323
4. Waldrop J.R. Appl. Phys. Lett. 43 (1983) 87
5. Bertoti I. Surf .Coat. Technol. 151-152 (2002) 194
6. Moretti G. J. Electr. Spectrosc. Relat. Phen. 95 (1998) 95
7. Muraishi S., Aizawa T., and Kuwahara H. Surf. Coat. Technol. 188-189 (2004) 260
8. Valentini A., Quaranta F., Penza M., Vasanelli L., and Battaglin G. J. Appl. Phys. 69 (1991) 7360
9. Popovic N., Bogdanov Z., Goncic B., Zec S., Racocevic Z., Zlatanovic M., and Perusko D. Thin Solid Films 459 (2004) 286
10. Seah M.P., and Dench W.A. Surf. Interf. Anal. 1 1 (1979) 2
11. Tanuma S., Powell C.J., and Penn D.R. Surf. Interf. Anal. 17 (1991) 911
12. In: Wagner C.D., Riggs W.M., Davis L.E., Moulder J.F., and Muilenberg G.E. (Eds). Handbook of X-ray Photoelectron Spectroscopy (1979), Perkin-Elmer Corporation, Eden Prairie, Minnesota