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Surface and Coatings Technology

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 260-264

Fabrication of nanostructured titanium thin films via N ion implantation and postannealing treatment

(3) Muraishi, S a,c Aizawa, T a Kuwahara, H b

a UNIVERSITY OF TOKYO (Japan)

b RESEARCH INSTITUTE FOR APPLIED SCIENCES (Japan)

c TOKYO INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

Ion beam sputter; Ion Implantation; Nitride; TEM; XPS

Indexed keywords

ION BEAMS; ION IMPLANTATION; NANOSTRUCTURED MATERIALS; SILICON; SPUTTERING; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

ION BEAM SPUTTERING (IBS); LOW TEMPERATURE NONEQUILIBRIUM PROCESSES; PHASE DECOMPOSITION; POSTANNEALING TREATMENT;

THIN FILMS;

FILM;

EID: 14644416576 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.08.040 Document Type: Article

Times cited : (11)

References (12)

1
- 0023136972
- O. Knotek W.D. Munz T. Leyendeccker J. Vac. Sci. Technol., A, Vac. Surf. Films 5 4 1987 2173-2179
- (1987) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.5 , Issue.4 , pp. 2173-2179
- Knotek, O.¹ Munz, W.D.² Leyendeccker, T.³

2
- 0031273068
- E. Blanquet A.M. Dutron V. Ghetta C. Bernard R. Madar Microelectron. Eng. 37/38 1997 189-195
- (1997) Microelectron. Eng. , vol.37-38 , pp. 189-195
- Blanquet, E.¹ Dutron, A.M.² Ghetta, V.³ Bernard, C.⁴ Madar, R.⁵

3
- 0042858383
- M. Nose Y. Deguchi T. Mae E. Honbo T. Nagase K. Nogi Surf. Coat. Technol. 174-175 2003 261-265
- (2003) Surf. Coat. Technol. , vol.174-175 , pp. 261-265
- Nose, M.¹ Deguchi, Y.² Mae, T.³ Honbo, E.⁴ Nagase, T.⁵ Nogi, K.⁶

4
- 0042660368
- E.O. Ristolainen J.M. Molarius A.S. Korhonen V.K. Lindroos J. Vac. Sci. Technol., A, Vac. Surf. Films 5 4 1987 2184-2189
- (1987) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.5 , Issue.4 , pp. 2184-2189
- Ristolainen, E.O.¹ Molarius, J.M.² Korhonen, A.S.³ Lindroos, V.K.⁴

5
- 0002545416
- S. Nagakura T. Kusunoki F. Kakimoto Y. Hirotsu J. Appl. Crystallogr. 8 65 1975 65-66
- (1975) J. Appl. Crystallogr. , vol.8 , Issue.65 , pp. 65-66
- Nagakura, S.¹ Kusunoki, T.² Kakimoto, F.³ Hirotsu, Y.⁴

6
- 0000988497
- S. Andersson B. Collen U. Kuylenstierna A. Magneli Acta Chem. Scand. 11 10 1957 1641-1652
- (1957) Acta Chem. Scand. , vol.11 , Issue.10 , pp. 1641-1652
- Andersson, S.¹ Collen, B.² Kuylenstierna, U.³ Magneli, A.⁴

7
- 0001359454
- B. Holmberg Acta Chem. Scand. 16 5 1962 1255-1261
- (1962) Acta Chem. Scand. , vol.16 , Issue.5 , pp. 1255-1261
- Holmberg, B.¹

8
- 0033731379
- S. Brennan A. Munkkholm O.S. Leung W.D. Nix Physica. B 283 2000 125-129
- (2000) Physica B , vol.283 , pp. 125-129
- Brennan, S.¹ Munkkholm, A.² Leung, O.S.³ Nix, W.D.⁴

9
- 2142763870
- S. Muraishi T. Aizawa Ceram. Trans. 148 2004 155-162
- (2004) Ceram. Trans. , vol.148 , pp. 155-162
- Muraishi, S.¹ Aizawa, T.²

10
- 2142784543
- K. Terashima K. Matsushita T. Minegishi J. Surf. Finish. Soc. Jpn. 43 1 1992 19-23
- (1992) J. Surf. Finish. Soc. Jpn. , vol.43 , Issue.1 , pp. 19-23
- Terashima, K.¹ Matsushita, K.² Minegishi, T.³

11
- 0027641945
- P.Y. Jouan M.C. Peignon Ch. Cardinaud G. Lemperiere Appl. Surf. Sci. 68 1993 595-603
- (1993) Appl. Surf. Sci. , vol.68 , pp. 595-603
- Jouan, P.Y.¹ Peignon, M.C.² Cardinaud, Ch.³ Lemperiere, G.⁴

12
- 0002230984
- S. Nagakura T. Kusunoki J. Appl. Crystallogr. 10 1977 52-56
- (1977) J. Appl. Crystallogr. , vol.10 , pp. 52-56
- Nagakura, S.¹ Kusunoki, T.²

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