Design and performance of a piezoelectric actuated precise rotary positioner

Proceedings of the 2005 IEEE International Conference on Mechatronics, ICM '05

Volumn 2005, Issue , 2005, Pages 313-317

  Chang, S H ^a   Wang, Y C ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Piezoelectric actuated precise rotary positioner

Indexed keywords

ACTUATORS; ELECTRIC DISCHARGE MACHINING; FINITE ELEMENT METHOD; MACHINE DESIGN; OPTIMIZATION; PIEZOELECTRICITY; ROTATING MACHINERY;

PIEZOELECTRIC ACTUATED PRECISE ROTARY POSITIONERS; ROTARY POSITIONERS; SCOTT RUSSEL MECHANISMS; WAFER FABRICATION;

TRACKING (POSITION);

EID: 33748913361     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMECH.2005.1529275     Document Type: Conference Paper

References (13)

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