RF sputtering deposition of alternate TiN/ZrN multilayer hard coatings

Thin Solid Films

Volumn 515, Issue 2 SPEC. ISS., 2006, Pages 500-504

  Rizzo, A ^a   Signore, M A ^a   Penza, M ^a   Tagliente, M A ^a   De Riccardis, F ^a   Serra, E ^a  

^a ENEA   (Italy)

Author keywords

RF reactive magnetron sputtering; Superlattice; ZrN TiN

Indexed keywords

CORROSION RESISTANCE; DEPOSITION; GLASS; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; NATURAL FREQUENCIES; SUPERLATTICES; TITANIUM NITRIDE; X RAY DIFFRACTION; ZIRCONIUM COMPOUNDS;

HARD COATINGS; INTERFACE EFFECTS; RF REACTIVE MAGNETRON SPUTTERING; ZRN/TIN;

MULTILAYERS;

EID: 33748887218     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.279     Document Type: Article

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