MD simulation of ultra-micro cutting of monocrystalline silicon with effects of air

JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing

Volumn 49, Issue 1, 2006, Pages 70-75

  Liu, Yanjie ^a   Inamura, Toyoshiro ^a   Takezawa, Nobuhiro ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Atmosphere; Cutting force; Micro cutting; Molecular dynamics; Silicon

Indexed keywords

COMPUTER SIMULATION; CRYSTAL CUTTING; DIAMOND CUTTING TOOLS; MOLECULAR DYNAMICS; SILICON; SINGLE CRYSTALS;

CUTTING FORCE; MONOCRYSTALLINE SILICON; ULTRA-MICRO CUTTING;

MICROMACHINING;

COMPUTER SIMULATION; CRYSTAL CUTTING; DIAMOND CUTTING TOOLS; MICROMACHINING; MOLECULAR DYNAMICS; SILICON; SINGLE CRYSTALS;

EID: 33748853851     PISSN: 13447653     EISSN: 1347538X     Source Type: Journal    
DOI: 10.1299/jsmec.49.70     Document Type: Article

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