Effect of surface oxidation on micromachinability of monocrystalline silicon

CIRP Annals - Manufacturing Technology

Volumn 50, Issue 1, 2001, Pages 393-396

  Inamura, T ^a   Feng, G Y ^b   Takezawa, N ^a   Mohri, N ^c  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

Cutting; Micro machinability; Oxidation

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPRESSIVE STRENGTH; ELASTIC MODULI; FORCE MEASUREMENT; MACHINABILITY; METAL CUTTING; MOLECULAR DYNAMICS; OXIDATION; RESIDUAL STRESSES; SILICON; SINGLE CRYSTALS; STRAIN HARDENING; SURFACE CHEMISTRY; VISCOPLASTICITY;

MICROCUTTING;

MICROMACHINING;

EID: 0034952826     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)62148-9     Document Type: Article

References (11)

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