메뉴 건너뛰기




Volumn 42, Issue 8, 2006, Pages 830-834

Radical-beam gettering epitaxy of GaN layers on nitrogen-ion-implanted GaAs substrates

Author keywords

[No Author keywords available]

Indexed keywords


EID: 33748772549     PISSN: 00201685     EISSN: 16083172     Source Type: Journal    
DOI: 10.1134/S0020168506080048     Document Type: Article
Times cited : (2)

References (14)
  • 1
    • 0005985130 scopus 로고    scopus 로고
    • GaN: Processing, defects, and devices
    • Pearton, S.J., Zolper, J.C., Shul, R.J., et al., GaN: Processing, Defects, and Devices, J. Appl. Phys., 1999, vol. 86, pp. 1-78.
    • (1999) J. Appl. Phys. , vol.86 , pp. 1-78
    • Pearton, S.J.1    Zolper, J.C.2    Shul, R.J.3
  • 3
    • 7044224795 scopus 로고    scopus 로고
    • Methods of high-energy chemistry in the technology of wide-gap chalcogenide semiconductors
    • Georgobiani, A.N., Kotlyarevsky, M.B., and Rogozin, I.V., Methods of High-Energy Chemistry in the Technology of Wide-Gap Chalcogenide Semiconductors, Inorg. Mater, 2004, vol. 40, suppl. 1, pp. S1-S18.
    • (2004) Inorg. Mater , vol.40 , Issue.1 SUPPL.
    • Georgobiani, A.N.1    Kotlyarevsky, M.B.2    Rogozin, I.V.3
  • 4
    • 0043239553 scopus 로고    scopus 로고
    • High pressure direct synthesis of III-V nitrides
    • Boćkowski, M., High Pressure Direct Synthesis of III-V Nitrides, Physica B (Amsterdam), 1999, vol. 265, pp. 1-5.
    • (1999) Physica B (Amsterdam) , vol.265 , pp. 1-5
    • Boćkowski, M.1
  • 5
    • 0001663823 scopus 로고    scopus 로고
    • Influence of thermal annealing on GaN buffer layers and the property of subsequent GaN layers grown by metalorganic chemical vapour deposition
    • Ito, T., Sumiya, M., Takano, Y., et al., Influence of Thermal Annealing on GaN Buffer Layers and the Property of Subsequent GaN Layers Grown by Metalorganic Chemical Vapour Deposition, Jpn. J. Appl. Phys., 1999, vol. 38, pp. 649-653.
    • (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 649-653
    • Ito, T.1    Sumiya, M.2    Takano, Y.3
  • 6
    • 0034245003 scopus 로고    scopus 로고
    • Influence of AlN buffer on phase structure of GaN on GaAs (001) grown by radio-frequency molecular beam epitaxy
    • Li, Z., Chen, H., Liu, H., et al., Influence of AlN Buffer on Phase Structure of GaN on GaAs (001) Grown by Radio-Frequency Molecular Beam Epitaxy, Jpn. J. Appl. Phys., 2000, vol. 39, pp. 4704-4706.
    • (2000) Jpn. J. Appl. Phys. , vol.39 , pp. 4704-4706
    • Li, Z.1    Chen, H.2    Liu, H.3
  • 7
    • 0031117144 scopus 로고    scopus 로고
    • The influence of preliminary ion implantation in the ZnSe on the properties of the ZnO-ZnSe structures, obtained by the radical beam gettering epitaxy method
    • Georgobiani, A.N., Kotlyarevsky, M.B., Rogozin, I.V., et al., The Influence of Preliminary Ion Implantation in the ZnSe on the Properties of the ZnO-ZnSe Structures, Obtained by the Radical Beam Gettering Epitaxy Method, Nucl. Instrum. Methods Phys. Res., Sect. A, 1997, vol. 388, pp. 431-433.
    • (1997) Nucl. Instrum. Methods Phys. Res., Sect. A , vol.388 , pp. 431-433
    • Georgobiani, A.N.1    Kotlyarevsky, M.B.2    Rogozin, I.V.3
  • 8
    • 0028282305 scopus 로고
    • Substrate nitridation effects on GaN grown GaAs substrates by molecular beam epitaxy using RF-radical nitrogen source
    • Kikuchi, A., Hoshi, H., and Kishino, K., Substrate Nitridation Effects on GaN Grown GaAs Substrates by Molecular Beam Epitaxy Using RF-Radical Nitrogen Source, Jpn. J. Appl. Phys., 1994, vol. 33, pp. 688-693.
    • (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 688-693
    • Kikuchi, A.1    Hoshi, H.2    Kishino, K.3
  • 9
    • 0000815007 scopus 로고
    • GaN, AlN, and InN: A review
    • Strite, S. and Morkoç, H., GaN, AlN, and InN: A Review, J. Vac. Sci. Technol., B, 1992, vol. 10, pp. 1237-1266.
    • (1992) J. Vac. Sci. Technol., B , vol.10 , pp. 1237-1266
    • Strite, S.1    Morkoç, H.2
  • 10
    • 21544442307 scopus 로고
    • Epitaxial growth of cubic and hexagonal GaN on GaAs by gas-source molecular-beam epitaxy
    • Okumura, H., Misawa, S., and Yoshida, S., Epitaxial Growth of Cubic and Hexagonal GaN on GaAs by Gas-Source Molecular-Beam Epitaxy, Appl. Phys. Lett., 1991, vol. 59, pp. 1058-1060.
    • (1991) Appl. Phys. Lett. , vol.59 , pp. 1058-1060
    • Okumura, H.1    Misawa, S.2    Yoshida, S.3
  • 11
    • 33748790785 scopus 로고    scopus 로고
    • Structure and properties of gallium nitride films produced by exposing gallium arsenide single crystals to atomic nitrogen
    • Sukach, G.A., Kidalov, V.V., Kotlyarevskii, M.B., et al., Structure and Properties of Gallium Nitride Films Produced by Exposing Gallium Arsenide Single Crystals to Atomic Nitrogen, Zh. Tekh. Fiz., 2003, vol. 73, no. 4, pp. 59-62.
    • (2003) Zh. Tekh. Fiz. , vol.73 , Issue.4 , pp. 59-62
    • Sukach, G.A.1    Kidalov, V.V.2    Kotlyarevskii, M.B.3
  • 12
    • 0030574520 scopus 로고    scopus 로고
    • Morphology and photoluminescence improvements from high-temperature rapid thermal annealing of GaN
    • Zolper, J.C., Hagerott Crawford, M., Howard, A.J., et al., Morphology and Photoluminescence Improvements from High-Temperature Rapid Thermal Annealing of GaN, Appl. Phys. Lett., 1996, vol. 68, pp. 200-202.
    • (1996) Appl. Phys. Lett. , vol.68 , pp. 200-202
    • Zolper, J.C.1    Hagerott Crawford, M.2    Howard, A.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.