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Volumn 45, Issue 29-32, 2006, Pages
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Nano-scale memory characteristics of silicon nitride charge trapping layer with silicon nanocrystals
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Author keywords
C AFM; Nano scale memory; Nonvolatile memory; Si nanocrystal; SONOS
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CHARGE TRAPPING;
CURRENT VOLTAGE CHARACTERISTICS;
MOS DEVICES;
NONVOLATILE STORAGE;
SILICON NITRIDE;
NANOSCALE MEMORY;
SEMICONDUCTOR PARAMETER ANALYZERS;
SILICON NANOCRYSTALS;
NANOCRYSTALS;
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EID: 33748771889
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.45.L807 Document Type: Article |
Times cited : (9)
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References (12)
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