Comparison of nanoindentation results obtained with Berkovich and cube-corner indenters

Philosophical Magazine

Volumn 86, Issue 33-35 SPEC. ISSUE, 2006, Pages 5265-5283

  Chudoba, T ^a   Schwaller, P ^b   Rabe, R ^b,c   Breguet, J M ^c   Michler, J ^b  

^a ASMEC GmbH   (Germany)

^b SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^c EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CRACKS; FINITE ELEMENT METHOD; FRACTURE TOUGHNESS; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; STRAIN; STRESSES;

BERKOVICH MEASUREMENTS; CUBE-CORNER INDENTERS; PYRAMIDAL INDENTERS; STRESS-STRAIN CURVES;

INDENTATION;

EID: 33748760888     PISSN: 14786435     EISSN: 14786443     Source Type: Journal    
DOI: 10.1080/14786430600746424     Document Type: Conference Paper

References (27)

1. C.B. Ponton and R.D. Rawlings, Mater. Sci. Technol. 5 865 (1989).
2. D.S. Harding, W.C. Oliver and G.M. Pharr, Mater. Res. Soc. Symp. Proc. 356 663 (1995).
3. S. Stauss, P. Schwaller, J.-L. Bucaille, et al., Microelectron. Eng. 67/68 818 (2003).
4. J.L. Bucaille, S. Stauss, E. Felder, et al., Acta Mater. 51 1663 (2003).
5. J.-L. Bucaille, S. Stauss, P. Schwaller, et al., Thin Solid Films 447/448 239 (2004).
6. N. Chollacoop, M. Dao and S. Suresh, Acta Mater. 51 3713 (2003).
7. J.S. Field, M.V. Swain and R.D. Dukino, J. Mater. Res. 18 1412 (2003).
8. W.C. Oliver and G.M. Pharr, J. Mater. Res. 7 1564 (1992).
9. R. Hill, The Mathematical Theory of Plasticity (Clarendon Press, Oxford, 1950).
10. D.M. Marsh, Proc. R. Soc. Lond. A 279 420 (1964).
11. K.L. Johnson, Contact Mechanics (Cambridge University Press, Cambridge, 1985).
12. I. Zhang and M. Sakai, Mater. Sci. Eng. A 381 62 (2004).
13. D. Tabor, Hardness of Metals (Oxford University Press, Oxford, 1951).
14. ISO 14577, Metallic Materials: Instrumented Indentation Test for Hardness and Materials Parameters (ISO Central Secretariat, Geneva, 2002).
15. R. Rabe, J.-M. Breguet, P. Schwaller, et al., Thin Solid Films 469/470 206 (2004).
16. European Project, EC Contract G6RD-CT2000-00418, Certified Reference Materials for Depth Sensing Indentation Instruments: DESIRED (2000).
17. European Project, Determination of Hardness and Modulus of Thin Films and Coatings by NanoindentaJion (INDICOAT), Contract no. SMT4-CT98-2249, NPL Report MATC(A) 24 (May 2001).
18. W.G.C. Kaye, T.H. Laby (Editors), Tables of Physical and Chemical Constants (Longman, London, 1995).
19. T. Chudoba, M. Griepentrog, A. Dück, et al., J. Mater. Res. 19 301 (2004).
20. W.C. Oliver and G.M. Pharr, J. Mater. Res. 19 3 (2004).
21. R.B. King, Int. J. Solids Struct. 23 1657 (1987).
22. M.T. Hendrix, J. Mater. Res. 10 255 (1995).
23. J.B. Wachtman Jr, W.E. Tefft, D.G. Lam Jr, et al., J. Res. Natl. Bur. Stand. A 64 213 (1960).
24. J.J. Vlassak, M. Ciavarella, J.R. Barber, et al., J. Mech. Phys. Solids 51 1701 (2003).
25. Y. Liu and A.H.W. Ngan, Scripta Mater. 44 237 (2001).
26. W.D. Nix and H. Gao, J. Mech. Phys. Solids 46 411 (1998).
27. S. Qu, Y. Huang, W.D. Nix, et al., J. Mater Res. 19 3423 (2004).