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Volumn 67-68, Issue , 2003, Pages 818-825

Determining the stress-strain behaviour of small devices by nanoindentation in combination with inverse methods

Author keywords

Finite element simulation; Inverse method; LIGA process; Mechanical properties; Nanoindentation

Indexed keywords

COMPUTER SIMULATION; ELASTIC MODULI; INDENTATION; LITHOGRAPHY; MICROSTRUCTURE; STRAIN; STRESSES; THIN FILMS;

EID: 0038358260     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00192-8     Document Type: Conference Paper
Times cited : (50)

References (18)
  • 1
    • 0032500424 scopus 로고    scopus 로고
    • Arzt E. Acta Mater. 46:1998;5611-5626.
    • (1998) Acta Mater. , vol.46 , pp. 5611-5626
    • Arzt, E.1
  • 14
    • 0038429428 scopus 로고    scopus 로고
    • Mimotec, in http://www.mimotec.ch (2002).
    • (2002)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.