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Volumn 67-68, Issue , 2003, Pages 818-825
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Determining the stress-strain behaviour of small devices by nanoindentation in combination with inverse methods
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EPFL
(Switzerland)
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Author keywords
Finite element simulation; Inverse method; LIGA process; Mechanical properties; Nanoindentation
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Indexed keywords
COMPUTER SIMULATION;
ELASTIC MODULI;
INDENTATION;
LITHOGRAPHY;
MICROSTRUCTURE;
STRAIN;
STRESSES;
THIN FILMS;
NANOINDENTATION;
MICROELECTROMECHANICAL DEVICES;
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EID: 0038358260
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-9317(03)00192-8 Document Type: Conference Paper |
Times cited : (50)
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References (18)
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