A new technique to determine the elastoplastic properties of thin metallic films using sharp indenters

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 239-245

  Bucaille, Jean Luc ^a,c   Stauss, Sven ^b   Schwaller, Patrick ^a   Michler, Johann ^a  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

^b Laboratory of Mechanical Metallurgy Ecole Polytechnique Federale de Lausanne   (Switzerland)

^c EPFL   (Switzerland)

Author keywords

Elastoplastic properties; Flow stress; Sharp intenders

Indexed keywords

DEFORMATION; ELASTIC MODULI; ELASTOPLASTICITY; FINITE ELEMENT METHOD; FRICTION; PLASTIC FLOW; STRAIN; STRESSES; TENSILE TESTING; THIN FILMS;

ELASTOPLASTIC PROPERTIES; SHARP INDENTERS;

METALLIC FILMS;

EID: 1342302474     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)01100-3     Document Type: Conference Paper

References (12)

1. Oliver W.C., Pharr G.M. J. Mater. Res. 7:1992;1564.
2. Stauss S., Schwaller P., Bucaille J.L., Rabe R., Rohr L., Michler J., Blank E. Microelectron. Eng. 67-68:2003;818.
3. Dao M., Chollacoop N., Van Vliet K.J., Venkatesh T.A., Suresh S. Acta Mater. 49:2001;3899.
4. Bucaille J.L., Stauss S., Felder E., Michler J. Acta Mater. 51:2003;1663.
5. Fahrni N., Lorenz H., Despont M., Brugger J., Vettiger P., Renaud P. Sens. Actuators A. 64:1998;33.
6. B.N. Lucas, W.C. Oliver, G.M. Pharr, J.-L. Loubet, in: W.-W. Gerberich, H. Gao, J.-E. Sundgren, S.-P. Baker (Eds.), Stresses and Mechanical Properties VI, Mater. Res. Soc. Symp. Proc. 436, (1996), 233.
7. Sneddon I.N. Int. J. Eng. Sci. 3:1965;47.
8. Ren X.J., Hooper R.M., Griffiths C. Philos. Mag. A. 82:(10):2002;2113.
9. Hainsworth S.V., Chandler H.W., Page T.F. J. Mater. Res. 11:(8):1996;1987.
10. Lide D.R. Handbook of Chemistry and Physics. 76th ed: 1995;CRC Press.
11. Tunvisut K., Busso E.P., O'Dowd N.P., Brandtner H.P. Philos. Mag. A. 82:(10):2002;2013.
12. Kocks U.F. Met. Trans. 1:1970;1121.