Hot embossing and injection molding for microoptical components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3135, Issue , 1997, Pages 24-29

  Heckele, Mathias ^a   Bacher, Walter ^a   Hanemann, Thomas ^a   Ulrich, Heinrich ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Hot embossing; Injection molding; Microoptics; Microspectrometer; Plastic molding

Indexed keywords

COMMERCIAL APPLICATIONS; HOT EMBOSSING; LATERAL STRUCTURING; MICRO OPTICAL COMPONENTS; MICROOPTICS; MICROSPECTROMETER; MULTILAYER (ML); PLASTIC MOLDING; PROCESS EQUIPMENTS; PRODUCTION TECHNOLOGIES; SHORT CYCLES;

ASPECT RATIO; INJECTION MOLDING; MOLDS; PLASTIC MOLDS; PLASTICS FORMING; PLASTICS MOLDING;

MOLDING;

EID: 33748558508     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284110     Document Type: Conference Paper

References (18)

1. E.W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, D. Münchmeyer, "Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Molding (LIGA Process)", Microelectronic Engineering 4 pp. 35-56, 1986
2. P. Bley, J. Mohr, "The LIGA Process - A Microfabrication Technology", FED Journal 5, Suppl. 1, pp. 34, 1994.
3. W. Bacher, K. Bade, M. Saumer, R. Schwarz, "Fabrication of LIGA Mold Inserts", HARMST 1997, Madison, USA (to be published).
4. J. Göttert, C. Müller, J. Mohr, "Examples and Potential Applications of LIGA Components in Microoptics"; in: W. Ehrfeld et al. (editors), Teubner Taschenbücher der Physik, Teubner, Stuttgart 27, pp219-247, 1993.
5. M. Harmening, W. Bacher, P. Bley, A. El-Kholi, H. Kalb, B. Kowanz, W. Menz, A. Michel, J. Mohr, "Molding of Threedimensional Microstructures by the LIGA Process"; Proc. MEMS '92, Travemünde, Germany Februar 92, IEEE, Cat. Nr. 0-7803-0497-7/92 $3.00, pp. 202, 1992.
6. V. Piotter, T. Hanemann, R. Ruprecht, J. Haußelt, "Injection Molding and Related Techniques for Fabrication of Microstructures", Microsystem Technologies 64, 1997 (to be published).
7. R. Ruprecht, W. Bacher, J.H. Haußelt, V. Piotter, "Injection Molding of LIGA and LIGA Similar Microstructures Using Filled and Unfilled Thermoplastics", SPIE Journal 2639 ISBN 0-8194-2005-0/95.7 pp. 146, 1995.
8. M. Heckele, W. Bacher, "Modular Molding Equipment for Quasi Monolithic Integration of Micromechanical and Microelectronic Components", MECHATRONICS, 3rd France-Japan Congress, Besançon, France, pp. 501-504, 1996.
9. M. Heckele, W. Bacher, "Modular Hot Embossing Equipment for MEMS", Micromachine Devices 2(2), pp. 1-3, 1997.
10. T. Hanemann, V. Piotter, R. Ruprecht, J. Haußelt, "New Advances in Micromolding Technology", Trends in Polymer Science (to be published).
11. J. Göttert, M. Marth, J. Mohr, B. Patterson, J. Söchtig, "Integration of III/V-Devices on Polymer Micro-Optical Benches with Single Mode Waveguides", OSA Conference on Lasers and Electro-Opticcs (CLEO 96) Anaheim, 1996.
12. J. Mohr, J. Göttert, A. Müller, "Microoptical Devices Based on Free Space Optics", SPIE Symp. Ser. 2783 pp. 6, 1996.
13. A. Müller, J. Göttert, J. Mohr, A. Rogner, "Fabrication of Stepped Microoptical Benches for Fibre and Free Space Application", Microsystem Technologies 2 pp. 40-45, 1996.
14. C. Oßmann, J. Göttert, M. Ilie, J. Mohr, P. Ruther, "Fabrication of PMMA based Microlenses using the LIGA-Process", EOS Topical Meeting on Microlens Arrays, Teddington, 1997
15. U. Köhler, A.E. Guber, W. Bier, M. Heckele, Th. Schaller, "Fabrication of Microlenses by Combining Silicon Technology, Mechanical Micromachining and Plastic Molding", SPIE Proc. Ser. 2687 pp. 18-22, 1996.
16. Sensors and Actuators A, 53, pp. 361 1996.
17. C. Müller, J. Mohr, "Microspectrometer Fabricated by the LIGA Process"; Interdisciplinary Science Reviews 18(3) pp. 273, 1993.
18. P. Krippner, J. Mohr, C. Müller, C. van der Sel, "Microspectrometer for the Infrared Range", Proc. Microoptical Technologies for Measurement, Sensors, and Microsystems, Besançon, France, pp. 277-282, 1996.