Electronic transport mechanism for nonalloyed Ti-based Ohmic contacts to n-AlGaN

Journal of Applied Physics

Volumn 100, Issue 4, 2006, Pages

  Jang, Ja Soon ^a   Seong, Tae Yeon ^a   Jeon, Seong Ran ^b  

^a Korea University   (South Korea)

^b Korea Photonics Technology Institute (KOPTI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC RESISTANCE; ELECTRON TRANSPORT PROPERTIES; OHMIC CONTACTS; POINT DEFECTS;

ALGAN CONTACTS; FIELD EMISSION MODE; SELF COMPENSATION; TUNNELING MODEL;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 33748302264     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2335507     Document Type: Article

References (18)

1. M. A. Khan, Q. Chen, M. S. Shur, B. T. MsDermott, and J. A. Higgins, IEEE Electron Device Lett. 17, 325 (1996).
2. Q. Z. Liu, S. S. Lau, and M. A. Khan, Appl. Phys. Lett. 71, 1658 (1997).
3. S. Ruvimov, Z. Liliental-Weber, J. Washburn, D. Qiao, Q. Z. Liu, S. S. Lau, and P. K. Chu, Appl. Phys. Lett. 73, 2582 (1998).
4. D. Qiao et al., J. Appl. Phys. 89, 5543 (2001).
5. S.-H. Lim, J. Washburn, Z. Liliental-Weber, and D. Qiao, Appl. Phys. Lett. 78, 3797 (2001).
6. S. Murai, H. Masuda, Y. Koide, and M. Murakami, Appl. Phys. Lett. 80, 2934 (2002).
7. B. Van Daele, G. Van Tendeloo, W. Ruythooren, J. Derluyn, M. R. Leys, and M. Germain, Appl. Phys. Lett. 87, 061905 (2005).
8. P. Boguslawski, E. L. Briggs, and J. Bernholc, Phys. Rev. B 51, 17255 (1995).
9. E. Yamaguchi and M. R. Junnarkar, J. Cryst. Growth 189/190, 570 (1998).
10. J. K. Kim, H. W. Jang, and J.-L. Lee, J. Appl. Phys. 94, 7201 (2003).
11. C. Stampft, J. Neugebauer, and C. G. Van de Walle, Mater. Sci. Eng., B 59, 253 (1999).
12. H. W. Jang, J. M. Baik, M.-K. Lee, H.-J. Shin, and J.-L. Lee, J. Electrochem. Soc. 151, G536 (2004).
13. G. S. Marlow and M. B. Das, Solid-State Electron. 25, 91 (1982).
14. H. Hasegawa, T. Inagaki, S. Otomo, and T. Hashizume, J. Vac. Sci. Technol. B 21, 1844 (2003).
15. C. W. Wilmsen, Physics and Chemistry of III-V Compound Semiconductor Interfaces (Plenum, New York, 1985).
16. J.-S. Jang and T.-Y. Seong, Appl. Phys. Lett. 76, 2743 (2000).
17. O. Madelung, Semiconductors: Data Handbook, 3rd ed. (Springer-Verlag, Berlin, 2004).
18. J.-S. Jang, T.-Y. Seong, and S.-R. Jeon (unpublished).