Reactive oxide micro-molding of thick lenses containing diffractive optical elements

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1326-1328

  Parashar, V K ^a   Sayah, A ^a   Orhan, J B ^a   Gijs, M A M ^a  

^a EPFL   (Switzerland)

Author keywords

Poly dimethylsiloxane mold; Reactive oxide micro molding; Replication technology; Sol gel process; Thick lens

Indexed keywords

DIFFRACTION GRATINGS; DIFFRACTIVE OPTICS; FUSED SILICA; HEAT TREATMENT; NANOSTRUCTURED MATERIALS; OLIGOMERS; PLASTICS MOLDING; POLYSILICON; REACTION KINETICS; SOL-GELS;

FRESNEL PATTERNS; REACTIVE OXIDE MICRO MOLDING; REPLICATION TECHNOLOGY; THICK LENS;

LENSES;

EID: 33748266309     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.080     Document Type: Article

References (7)

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