-
1
-
-
0031348356
-
Replication techniques for diffractive optical elements
-
M.T. Gale, Replication techniques for diffractive optical elements, Microelect. Eng. vol. 34, pp. 321- 339, 1997.
-
(1997)
Microelect. Eng.
, vol.34
, pp. 321-339
-
-
Gale, M.T.1
-
2
-
-
0033132119
-
Nanoscale Embossing of Polymers using a Thermoplastic Die
-
B. G. Casey, D. R. S. Cumming, I. I. Khandaker, A. S. G. Curtis and C. D. W. Wilkinson, Nanoscale Embossing of Polymers using a Thermoplastic Die, Microelect. Eng. vol 46, pp. 125-128, 1999.
-
(1999)
Microelect. Eng.
, vol.46
, pp. 125-128
-
-
Casey, B.G.1
Cumming, D.R.S.2
Khandaker, I.I.3
Curtis, A.S.G.4
Wilkinson, C.D.W.5
-
3
-
-
0035450071
-
Diffractive grey-tone phase masks for laser ablation lithography
-
C. David, J. Wei, T. Lippert and A. Wokaun, Diffractive grey-tone phase masks for laser ablation lithography, Microelect. Eng. vol 57-58, pp. 453-460, 2001
-
(2001)
Microelect. Eng.
, vol.57-58
, pp. 453-460
-
-
David, C.1
Wei, J.2
Lippert, T.3
Wokaun, A.4
-
4
-
-
0038358327
-
Fabrication of microoptical elements in quartz by laser induced backside wet etching
-
G. Kopitkovas, T. Lippert, C. David, A. Wokaun and J. Gobrecht, Fabrication of microoptical elements in quartz by laser induced backside wet etching, Microelect. Eng., vol 67-68, pp. 438-444, 2003.
-
(2003)
Microelect. Eng.
, vol.67-68
, pp. 438-444
-
-
Kopitkovas, G.1
Lippert, T.2
David, C.3
Wokaun, A.4
Gobrecht, J.5
-
5
-
-
0035896107
-
Patterning Porous Oxides within MicroChannel Networks
-
P. Yang, A.H. Rizvi, B. Messer, B.F. Chemelka, G.M. Whitsides and G.D. Stucky, Patterning Porous Oxides within MicroChannel Networks, Adv. Mater. vol 13, pp. 427-431, 2001.
-
(2001)
Adv. Mater.
, vol.13
, pp. 427-431
-
-
Yang, P.1
Rizvi, A.H.2
Messer, B.3
Chemelka, B.F.4
Whitsides, G.M.5
Stucky, G.D.6
-
6
-
-
0036124336
-
Micro-replication of optical lenses in glass using a novel sol-gel technology
-
A. Sayah, V.K. Parashar and M.A.M. Gijs, Micro-replication of optical lenses in glass using a novel sol-gel technology, Proc. IEEE-MEMS '02 (2002), pp. 516-519.
-
(2002)
Proc. IEEE-MEMS '02
, pp. 516-519
-
-
Sayah, A.1
Parashar, V.K.2
Gijs, M.A.M.3
-
7
-
-
0037682192
-
Nano-replication of diffractive optical elements in sol-gel derived glasses
-
V.K. Parashar, A. Sayah, M. Pfeffer, F. Schoch, J. Gobrecht and M.A.M. Gijs, Nano-replication of diffractive optical elements in sol-gel derived glasses, Microelect. Eng., 67-68, pp. 710-719, 2003.
-
(2003)
Microelect. Eng.
, vol.67-68
, pp. 710-719
-
-
Parashar, V.K.1
Sayah, A.2
Pfeffer, M.3
Schoch, F.4
Gobrecht, J.5
Gijs, M.A.M.6
-
8
-
-
3042739563
-
Diffractive optical elements in titanium oxide for MOEMS applications
-
th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, June 8-12 (2003), pp. 1482-1485.
-
(2003)
th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, June
, pp. 1482-1485
-
-
Parashar, V.K.1
Sayah, A.2
Cuche, E.3
Depeursinge, C.4
Gijs, M.A.M.5
-
9
-
-
3042819448
-
-
Web site address: http://www.isc.fraunhofer.de/gb/ormocere/o0.ht ml [10]
-
-
-
-
10
-
-
0030191177
-
Ultraviolet light imprinted sol-gel silica glass waveguide devices on silicon
-
P. Coudray, J. Chisham, A. Malek-Tabrizi, Li C.-Y., M. P. Andrews, N. Peyghambarian and S. I. Najafi, Ultraviolet light imprinted sol-gel silica glass waveguide devices on silicon, Optics Comm, vol 128, pp 19-22,1996
-
(1996)
Optics Comm
, vol.128
-
-
Coudray, P.1
Chisham, J.2
Malek-Tabrizi, A.3
Li, C.-Y.4
Andrews, M.P.5
Peyghambarian, N.6
Najafi, S.I.7
-
11
-
-
3042742457
-
-
Web site Prof. Whitesides' group; address: http://gmwgroup.harvard.edu
-
-
-
|