The sol-gel process for realisation of optical micro-structures in glass

Key Engineering Materials

Volumn 264-268, Issue I, 2004, Pages 371-374

  Parashar, V K ^a   ASayah, ^a   Gijs, M A M ^a  

^a EPFL   (Switzerland)

Author keywords

Diffractive Optical Elements; Microfabrication; Microlens; Sol Gel

Indexed keywords

ANNEALING; HEAT TREATMENT; IRRADIATION; MICROSTRUCTURE; ORGANOMETALLICS; PARTICLE SIZE ANALYSIS; PHASE TRANSITIONS; SILICON WAFERS; SOL-GELS; SYNTHESIS (CHEMICAL);

DIFFRACTIVE OPTICAL ELEMENTS; MICROFABRICATION; MICROLENS; OPTICAL DIFFRACTION;

OPTICAL GLASS;

EID: 8644255999     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (5)

1. X. Li, T. Abe and M. Eshashi: Sens & Act. A. 87 (2001), p. 139.
2. C. David, J. Wei, T. Lippert and A. Wokaun: Microelec. Eng. 57-58 (2001), p. 453.
3. M.T. Gale: Microelect. Eng. 34 (1997), p. 321.
4. A. Sayah, V.K. Parashar and M.A.M. Gijs: Proceed. IEEE-MEMS 2002 Conference, Las Vegas, USA, January 20-24, 2002, p. 516.
5. V.K. Parashar, A. Sayah, M. Pfeffer, F. Schoch, J. Gobrecht and M.A.M. Gijs: Proceed. MNE-02 Conference, Lugano, Switzerland, Sept. 16-19, 2002, p. 250.