Fabrication of micro-photonic devices using embossing technique

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1336-1338

  Choi, C H ^a   Lee, M W ^a   O, B H ^a   Lee, S G ^a   Park, S G ^a   Lee, E H ^a  

^a Inha University   (South Korea)

Author keywords

Demultiplexer; Embossing; Optical power splitter; PDMS; Photonic devices

Indexed keywords

DEMULTIPLEXING; MICROELECTRONICS; OPTICAL BEAM SPLITTERS; PHOTONS; PHOTORESISTS; POLYMERS; POLYSILICON;

DEMULTIPLEXERS; OPTICAL POWER SPLITTER; PHOTONIC DEVICES; UV EMBOSSING TECHNIQUES;

OPTICAL DEVICES;

EID: 33748260635     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.057     Document Type: Article

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