Atomic force microscopy study of growth kinetics: Scaling in TiN-TiB 2 nanocomposite films on Si(1 0 0)

Applied Surface Science

Volumn 252, Issue 23, 2006, Pages 8091-8095

  Chu, K ^a   Liu, Z J ^a   Lu, Y H ^a   Shen, Y G ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Atomic force microscopy; Growth kinetics; Surface evolution; TiN TiB 2 thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; SILICON; THIN FILMS; TITANIUM NITRIDE;

NANOCOMPOSITE FILMS; SI(1 0 0); SURFACE EVOLUTION; TIN-TIB2 THIN FILMS;

GROWTH KINETICS;

EID: 33748193374     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.10.027     Document Type: Article

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