Evaluation of adhesion and tribological behaviour of tantalum oxynitride thin films deposited by reactive magnetron sputtering onto steel substrates

Surface and Coatings Technology

Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6500-6504

  Banakh, O ^a   Csefalvay, C ^a   Steinmann, P A ^a   Fenker, M ^b   Kappl, H ^b  

^a University of Applied Sciences   (Switzerland)

^b Depart of Electrochemistry Research Institute for Precious Metals and Metal Chemistry Fem   (Germany)

Author keywords

Adhesion; Tantalum; Thin films; Transition metal oxynitrides

Indexed keywords

ADHESION; HARDNESS; INORGANIC COATINGS; MAGNETRON SPUTTERING; SPALLING; STEEL; SUBSTRATES; THIN FILMS; TRIBOLOGY;

INTERFACIAL SPALLATION; PIN-ON-DISK TESTS; SCRATCH TESTS;

TANTALUM COMPOUNDS;

ADHESION; HARDNESS; INORGANIC COATINGS; MAGNETRON SPUTTERING; SPALLING; STEEL; SUBSTRATES; TANTALUM COMPOUNDS; THIN FILMS; TRIBOLOGY;

EID: 33748175587     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.079     Document Type: Article

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