Investigation of BCN films deposited at various N2/Ar flow ratios by DC reactive magnetron sputtering

IEEE Transactions on Plasma Science

Volumn 34, Issue 4 I, 2006, Pages 1199-1203

  Xu, Shuyan ^a   Ma, Xinxin ^a   Su, Mingren ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Bonding configurations; Boron carbonitride (BCN) film; Fourier transform infrared spectroscopy (FTIR); X ray photoelectron spectroscopy (XPS)

Indexed keywords

CRYSTAL MICROSTRUCTURE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; X RAY PHOTOELECTRON SPECTROSCOPY;

ATOMIC HYBRIDIZATION; BONDING CONFIGURATIONS; BORON CARBONITRIDE (BCN) FILMS;

BORON COMPOUNDS;

EID: 33748125717     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2006.879179     Document Type: Article

References (23)

1. M. K. Lei, Q. Li, Z. F. Zhou, I. Bello, C. S. Lee, and S. T. Lee, "Characterization and optical investigation of BCN film deposited by RF magnetron sputtering," Thin Solid Films, vol. 389, no. 1/2, pp. 194-199, Jun. 2001.
2. T. Yuki, S. Umeda, and T. Sugino, "Electrical and optical characteristics of boron carbon nitride films synthesized by plasma-assisted chemical vapor deposition," Diamond Rel. Mater., vol. 13, no. 4-8, pp. 1130-1134, Apr.-Aug. 2004.
3. S. Ulrich, T. Theel, J. Schwan, and H. Ehrhardt, "Magnetron-sputtered superhard materials," Surf. Coat. Technol., vol. 97, no. 1-3, pp. 45-49, Dec. 1997.
4. R. Gago, I. Jimenez, T. Sajavaara, E. Rauhala, and J. M. Albella, "X-Ray absorption studies of cubic boron-carbon-nitrogen films grown by ion beam assisted evaporation," Diamond Rel. Mater., vol. 10, no. 3-7, pp. 1165-1169, Mar.-Jul. 2001.
5. I. Caretti, I. Jimenez, R. Gago, D. Caceres, B. Abendroth, and J. M. Albella, "Tribological properties of ternary BCN films with controlled composition and bonding structure," Diamond Rel. Mater., vol. 13, no. 4-8, pp. 1532-1537, Apr.-Aug. 2004.
6. C. Kimura, K. Okada, S. Funakawa, S. Sakata, and T. Sugino, "Electron affinity and field emission characteristics of boron carbon nitride film," Diamond Rel. Mater., vol. 14, no. 3-7, pp. 719-723, Mar.-Jul. 2005.
7. H. Ahn, L. Alberts, Y.-M. Kim, J. Yu, and K. T. Rie, "BCN coatings at low temperature using PACVD: Capacitive vs. inductive plasma coupling," Surf. Coat. Technol., vol. 169/170, pp. 251-253, 2003.
8. Z. F. Zhou, I. Bello, M. K. Lei, K. Y. Li, C. S. Lee, and S. T. Lee, "Synthesis and characterization of boron carbon nitride films by radio frequency magnetron sputtering," Surf. Coat. Technol., vol. 128/129, pp. 334-340, 2000.
9. V. Ageev, S. Klimentov, M. Ugarov, E. Loubnin, A. Bensaoula, N. Badi, A. Tempez, and D. Starikov, "Enhanced free carrier generation in boron nitride films by pulsed laser radiation," Appl. Surf. Sci., vol. 138/139, no. 1, pp. 364-369, Jan. 1999.
10. D. C. Reigada and F. L. Freire, Jr, "Nitrogen incorporation into boron carbide films deposited by dc-magnetron sputtering: Film microstructure and tribological properties," Surf. Coat. Technol., vol. 142-144, pp. 889-893, 2001.
11. M. P. Johansson, N. Hellgren, T. Berlind, E. Broitman, L. Hultman, and J.-E. Sundgren, "Growth of CNx/BN:C multilayer films by magnetron sputtering," Thin Solid Films, vol. 360, no. 1/2, pp. 17-23, Feb. 2000.
12. M. P. Johansson, H. Sjöström, and L. Hultman, "HREM and nanoindentation studies of BN:C films deposited by reactive sputtering from a B4C target," Vacuum, vol. 53, no. 3/4, pp. 451-457, Jun. 1999.
13. N. Hellgrenl, T. Berlind, G. K. Gueorguiev, M. P. Johansson, S. Stafström, and L. Hultman, "Fullerene-like B C N thin films: A computational and experimental study," Mater. Sci. Eng. B, vol. 113, no. 3, pp. 242-247, Nov. 2004.
14. V. Linss, I. Hermann, N. Schwarzer, U. Kreissig, and F. Richter, "Mechanical properties of thin films in the ternary triangle B-C-N," Surf. Coat. Technol., vol. 163/164, pp. 220-226, Jan. 2003.
15. M. U. Guruz, V. P. Dravid, and Y. W. Chung, "Synthesis and characterization of single and multilayer boron nitride and boron carbide thin films grown by magnetron sputtering of boron carbide," Thin Solid Films, vol. 414, no. 1, pp. 129-135, Jul. 2002.
16. O. Knotek, E. Lugscheider, and C. W. Siry, "Superhard PVD coatings in the B-N-C triangle," Int. J. Refractory Metals Hard Mater., vol. 17, no. 1, pp. 157-162, May 1999.
17. J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, Handbook of X-ray Photoelectron Spectroscopy. Chanhassen, MN: Physical Electronics, 1995.
18. W. J. Pan, J. Sun, H. Ling, N. Xu, Z. F. Ying, and J. D. P. Wu, "Preparation of thin films of carbon-based compounds," Appl. Surf. Sci., vol. 218, no. 1-4, pp. 297-304, Sep. 2003.
19. F. L. Huang, C. B. Cao, X. Xiang, R. T. Lv, and H. S. Zhu, "Synthesis of hexagonal boron carbonitride phase by solvothermal method," Diamond Rel. Mater., vol. 13, no. 10, pp. 1757-1760, Oct. 2004.
20. 2/Ar ratios by the vacuum cathodic arc deposition method," Surf. Coat. Technol., vol. 172, no. 1, pp. 102-108, Jul. 2003.
21. Z. Han, G. Li, J. Tian, and M. Gu, "Microstructure and mechanical properties of boron carbide thin films," Mater. Lett., vol. 57, no. 4, pp. 899-903, 2002.
22. C. E. Bottani, R. Checchetto, A. Miotello, and P. M. Ossi, "Structural and elastic properties of cubic boron nitride films," Surf. Coat. Technol., vol. 151/152, pp. 151-154, Mar. 2002.
23. Y. K. Yap, Y. Wada, M. Yamaoka, M. Yoshimura, Y. Mori, and T. B. Sasaki, "Bond modification of BCN films on Ni substrate," Diamond Rel. Mater., vol. 10, no. 3-7, pp. 1137-1141, Mar./Jul. 2001.