Interfaces in heterostructures of AlInGaN/GaN/ Al2O3

Superlattices and Microstructures

Volumn 39, Issue 5, 2006, Pages 429-435

  Zhou, Shengqiang ^a   Wu, M F ^a   Yao, S D ^a   Liu, J P ^b   Yang, H ^b  

^a PEKING UNIVERSITY   (China)

^b INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

Interface; Nitride semiconductors; Rutherford backscattering channeling; Transmission electron microscopy; X ray diffraction

Indexed keywords

CRYSTALLINE MATERIALS; HETEROJUNCTIONS; INTERFACES (MATERIALS); NITRIDES; NUCLEATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

CHANNELING; CRYSTALLINE QUALITY; NITRIDE SEMICONDUCTORS; QUATERNARY LAYERS;

ALUMINUM COMPOUNDS;

EID: 33748036280     PISSN: 07496036     EISSN: 10963677     Source Type: Journal    
DOI: 10.1016/j.spmi.2005.10.003     Document Type: Article

References (11)

1. Aumer M.E., LeBoeuf S.F., Bedair S.M., Smith M., Lin J.Y., and Jiang H.X. Appl. Phys. Lett. 77 (2000) 821
2. Chu W.K., Mayer J.W., and Nicolet M.A. Backscattering Spectrometry (1978), Academic Press, New York
3. Davies J.A. Handbook of Modern Ion Beam Materials Analysis (1995), Materials Research Society, Pittsburgh
4. Liu J.P., Zhang B.S., Wu M., Li D.B., Zhang J.C., Jin R.Q., Zhu J.J., Chen J., Wang J.F., Wang Y.T., and Yang H. J. Cryst. Growth 260 (2004) 388
5. Doolittle L.R. Nucl. Instrum. Methods B 9 (1985) 344
6. Barrett J.H. Phys. Rev. B 28 (1983) 2328
7. Chu W.K., Pan C.K., and Chang C.A. Phys. Rev. B 28 (1983) 4033
8. Wu M.F., Zhou S.Q., Yao S.D., Zhao Q., Vantomme A., Daele B.V., Piscopiello E., Tendeloo G.V., Tong Y.Z., Yang Z.J., et al. J. Vac. Sci. Technol. B 22 (2004) 920
9. Chu W.K., Saris F.W., Chang C.A., Ludeke R., and Esaki L. Phys. Rev. B 26 (1982) 1999
10. Wu X.H., Kapolnek D., Tarsa E.J., Heying B., Keller S., Keller B.P., Mishra U.K., DenBaars S.P., and Speck J.S. Appl. Phys. Lett. 68 (1996) 1371
11. Cheng L., Zhou K., Zhang Z., Zhang G., Yang Z., and Tong Y. Appl. Phys. Lett. 74 (1999) 661