Numerical simulation of magnetic-field-enhanced plasma immersion ion implantation in cylindrical geometry

IEEE Transactions on Plasma Science

Volumn 34, Issue 4 I, 2006, Pages 1127-1135

  Kostov, Konstantin G ^a   Barroso, Joaquim J ^b  

^a SÃO PAULO STATE UNIVERSITY UNESP   (Brazil)

^b INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

Author keywords

Ion implantation; Magnetic field effects; Plasma materials processing applications; Plasma sheaths

Indexed keywords

COMPUTER SIMULATION; ION IMPLANTATION; MAGNETIC FIELD EFFECTS; MAGNETIC FIELD MEASUREMENT; MONTE CARLO METHODS; PLASMA DENSITY; PLASMA SHEATHS;

ELECTRON COLLISION; MAGNETIC FIELD INTENSITY; PLASMA IMMERSION ION IMPLANTATION (PIII);

PLASMA APPLICATIONS;

EID: 33747834653     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2006.878390     Document Type: Article

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