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Volumn 46, Issue 9-11, 2006, Pages 1603-1607

Gate voltage and oxide thickness dependence of progressive wear-out of ultra-thin gate oxides

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN; MATHEMATICAL MODELS; VOLTAGE CONTROL; VOLTAGE MEASUREMENT;

EID: 33747779669     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2006.07.042     Document Type: Article
Times cited : (12)

References (15)
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  • 2
    • 0034453380 scopus 로고    scopus 로고
    • Kaczer B et al. Impact of MOSFET oxide breakdown on digital circuit operation and reliability. Tech Dig IEEE Int Electron Device Meeting (2000), p. 553.
  • 3
    • 18544395099 scopus 로고    scopus 로고
    • Influence and model of gate oxide breakdown on CMOS inverters
    • Rodríguez R., et al. Influence and model of gate oxide breakdown on CMOS inverters. Microelectronics Reliability 43 (2003) 1439
    • (2003) Microelectronics Reliability , vol.43 , pp. 1439
    • Rodríguez, R.1
  • 4
    • 0036712470 scopus 로고    scopus 로고
    • The impact of gate-oxide breakdown on SRAM stability
    • Rodríguez R., et al. The impact of gate-oxide breakdown on SRAM stability. IEEE Electr Dev Letters 23 9 (2002) 559
    • (2002) IEEE Electr Dev Letters , vol.23 , Issue.9 , pp. 559
    • Rodríguez, R.1
  • 5
    • 0036540085 scopus 로고    scopus 로고
    • Analysis and modeling of a digital CMOS circuit operation and reliability after gate oxide breakdown: a case study
    • Kaczer B., et al. Analysis and modeling of a digital CMOS circuit operation and reliability after gate oxide breakdown: a case study. Microelectronics Reliability 42 (2002) 555
    • (2002) Microelectronics Reliability , vol.42 , pp. 555
    • Kaczer, B.1
  • 6
    • 28744444182 scopus 로고    scopus 로고
    • Chen J-S et al. Impact of MOSFET gate-oxide reliability on CMOS operational amplifiers in a 130-nm low-voltage CMOS process. IEEE Int Reliability Physics Symposium (2005), p. 423.
  • 7
    • 3042568667 scopus 로고    scopus 로고
    • Mason PW et al. A methodology for accurate assessment of soft-broken gate oxide leakage and the reliability of VLSI circuits. IEEE Int Reliability Physics Symposium (2004), p. 430.
  • 8
    • 0033725296 scopus 로고    scopus 로고
    • Linder BP et al. Gate oxide breakdown under Current Limited Constant Voltage Stress. VLSI (2000), p. 214.
  • 9
    • 0034790378 scopus 로고    scopus 로고
    • Linder BP et al. Transistor-limited constant voltage stress of gate dielectrics. VLSI (2001), p. 93.
  • 10
    • 33745671428 scopus 로고    scopus 로고
    • Röhner M et al. Voltage acceleration of TBD and its correlation to the post breakdown conductivity of n- and p-channel MOSFETs. Proc IEEE Int Reliability Physics Symposium (2006), p. 76.
  • 11
    • 0037002325 scopus 로고    scopus 로고
    • Reliability - On the Weibull Shape Factor of Intrinsic Breakdown of Dielectric Films and Its Accurate Experimental Determination - Part I: Theory, Methodology, Experimental Techniques
    • Wu E.Y., et al. Reliability - On the Weibull Shape Factor of Intrinsic Breakdown of Dielectric Films and Its Accurate Experimental Determination - Part I: Theory, Methodology, Experimental Techniques. IEEE Trans on Electr Dev 49 12 (2002) 2131
    • (2002) IEEE Trans on Electr Dev , vol.49 , Issue.12 , pp. 2131
    • Wu, E.Y.1
  • 12
    • 0008536196 scopus 로고    scopus 로고
    • New insights in the relation between electron trap generation and the statistical properties of oxide breakdown
    • Degraeve R., et al. New insights in the relation between electron trap generation and the statistical properties of oxide breakdown. IEEE Trans on Electr Dev 45 4 (1998) 904
    • (1998) IEEE Trans on Electr Dev , vol.45 , Issue.4 , pp. 904
    • Degraeve, R.1
  • 13
    • 0000041835 scopus 로고    scopus 로고
    • Percolation models for gate oxide breakdown
    • Stathis J.H. Percolation models for gate oxide breakdown. J Appl Phys 86 10 (1999) 5757
    • (1999) J Appl Phys , vol.86 , Issue.10 , pp. 5757
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  • 14
    • 33745645666 scopus 로고    scopus 로고
    • Impact of Failure Criteria on the Reliability Prediction of CMOS Devices With Ultrathin Gate Oxides Based on Voltage Ramp Stress
    • Kerber A., et al. Impact of Failure Criteria on the Reliability Prediction of CMOS Devices With Ultrathin Gate Oxides Based on Voltage Ramp Stress. IEEE Electr Dev Letters 27 7 (2006) 609
    • (2006) IEEE Electr Dev Letters , vol.27 , Issue.7 , pp. 609
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  • 15
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.