Fabrication of high aspect ratio ferroelectric microtubes by vacuum infiltration using macroporous silicon templates

Journal of the American Ceramic Society

Volumn 89, Issue 9, 2006, Pages 2695-2701

  Bharadwaja, S S N ^a   Olszta, M ^a   Trolier McKinstry, S ^a   Li, X ^b   Mayer, T S ^b   Roozeboom, F ^c  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b The Pennsylvania State University   (United States)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC MICROTUBES; MACROPOROUS SILICON; PHASE PURITY; VACUUM INFILTRATION;

ANNEALING; ARRAYS; ASPECT RATIO; CRYSTALLIZATION; PEROVSKITE; PYROLYSIS; SILICON; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

FERROELECTRIC MATERIALS;

EID: 33747614101     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2006.01123.x     Document Type: Article

References (30)

1. K. A. Klicker, J. V. Biggers, and R. E. Newnham, "Composites of PZT and Epoxy for Hydrostatic Transducer Applications," J. Am. Ceram. Soc., 64, 5-9 (1981).
2. E. K. Akdogan, M. Allahverdi, and A. Safari, "Piezoelectric Composites for Sensor and Actuator Applications," IEEE Trans. Ultrason. Ferroelectr. Frequency Control, 52, 746-75 (2005).
3. 3-Polymer Composites," J. Appt. Phys., 92, 6119-27 (2002).
4. T. R. Gururaja, W. A. Schulze, L. E. Cross, R. E. Newnham, B. A. Auld, and Y. J. Wang, "Piezoelectric Composite Materials for Ultrasonic Transducer Applications. Part I: Resonant Modes of Vibration of PZT Rod-Polymer Composites," IEEE Trans. Sonics Ultrason., SU-32, 481-98 (1985).
5. S. Wang, J.-F. Li, K. Wakabayashi, M. Esashi, and R. Watanabe, "Lost Silicon Mold Process for PZT Microstructures," Adv. Muter., 11, 873-6 (1999).
6. J. F. Scott, F. D. Morrison, M. Miyake, P. Zubko, X. J. Lou, V. M. Kugler, S. Rios, M. Zhang, T. Tatsuta, O. Tsuji, and T. J. Leedham, "Recent Materials Characterizations of [2D] and [3D] Thin Film Ferroelectric Structures," J. Am. Ceram. Soc., 88, 1691-701 (2005).
7. S. S. N. Bharadwaja, D. J. Won, H. Fang, V. Gopalan, S. Trolier-MeKinstry, N. Saldanha, and T. Mayer, "Processing and Properties of High Aspect Ratio Ferroelectric Structures"; pp. 189-91 in 14th IEEE International Symposium on Applications of Ferroelectrics-ISAF-04, Edited by M. P. Yuhas, Montreal, Canada, 2004.
8. 3 Thin-Films," Appl. Phys. Lett., 59, 2524-6 (1991).
9. N. A. Pertsev, A. G. Zembilgotov, and A. K. Tagantsev, "Effect of Mechanical Boundary Conditions on Phase Diagrams of Epitaxial Ferroelectric Thin Films," Phys. Rev. Lett., 80, 1988-91 (1998).
10. S. K. Streiffer, C. B. Parker, A. E. Romanov, M. J. Lefevre, L. Zhao, J. S. Speck, W. Pompe, C. M. Foster, and G. R. Bai, "Domain Patterns in Epitaxial Rhombohedral Ferroelectric Films. I. Geometry and Experiments," J. Appl. Phys., 83, 2742-53 (1998).
11. N. A. Pertsev, A. G. Zembilgotov, S. Hoffmann, R. Waser, and A. K. Tagantsev, "Ferroelectric Thin Films Grown on Tensile Substrates: Renormalization of the Curie-Weiss Law and Apparent Absence of Ferroelectricity," J. Appl. Phys., 85, 1698-701 (1999).
12. F. Xu, S. Trolier-McKinstry, W. Ren, B. Xu, Z.-L. Xie, and K. J. Hemker, "Domain Wall Motion and its Contribution to the Dielectric and Piezoelectric Properties of Lead Zirconale Titanate Films," J. Appl. Phys., 89, 1336-48 (2001).
13. A. Stanishevsky, B. Nagaraj, J. Melngailis, R. Ramesh, L. Khriachtchev, and E. McDaniel, "Radiation Damage and its Recovery in Focused Ion Beam Fabricated Ferroelectric Capacitors," J. Appl. Phys., 92, 3275-8 (2002).
14. M. Alexe, C. Harnagea, and D. Hesse, "Non-conventional Micro- and Nanopatterning Techniques for Electroceramics," J. Electroceram., 12, 69-88 (2004).
15. G. Suyal, E. Colla, R. Gysel, M. Canloni, and N. Setter, "Piezoelectric Response and Polarization Switching in Small Anisotropic Perovskite Particles," Nano Lett., 4 [7] 1339-42 (2004).
16. 3 by a Low Temperature Solution Method," J. Nanosci. Nanotechnol., 2, 617-9 (2002).
17. J. J. Urban, J. E. Spanier, L. Ouyang, W. S. Yun, and H. Park, "Single-Crystalline Barium Titanate Nanowires," Adv. Mater., 15, 423-6 (2003).
18. T. Aoki, S. Shimada, K. Kurihara, and M. Kuwabara, "Fabrication and Properties of PLZT Photonic Crystal Using a Sol-Gel Method"; pp. 69-72 in The 11th US-Japan Seminar on Dielectric & Piezoelectric Ceramics, September 9-12, 2003.
19. K.-S. Chang, B. A. Hernandez, E. R. Fisher, and P. K. Dorhout, "Sol-Gel Template Synthesis and Characterization of PT, PZ, and PZT Nanotubes," J. Korean Chem. Soc., 46, 241-51 (2002).
20. E. D. Mishina, N. E. Sherstyuk, V. I. Stadnuchyuk, K. A. Vorotilov, V. A. Vasil'ev, A. S. Sigov, O. M. Zhigalina, N. Ohta, and S. Nakabayashi, "Ferroelectrics Templaled in Nanoporous Silicon Membranes," Ferroelectrics, 286, 205-11 (2003).
21. Y. Luo, I. Szafraniak, N. D. Zakharov, V. Nagarajan, M. Steinhart, R. B. Wehrspohn, J. H. Wendorff, R. Ramesh, and M. Alexe, "Nanoshell Tubes of Ferroelectric Lead Zirconate Titanate and Barium Titanate," Appl. Phys. Lett., 83, 440-2 (2003).
22. F. D. Morrison, L. Ramsay, and J. F. Scott, "High Aspect Ratio Piezoelectric Strontium-Bismuth-Tantalate Nanotubes." J. Phys. Condens. Matter, 15, L527-32, (2003).
23. R. A. Wolf and S. Trolier-McKinstry, "Temperature Dependence of the Piezoelectric Response in Lead Zirconate Titanate Films," J. Appl. Phys., 95, 1397-406 (2004).
24. M. Steinhart, Z. Jia, A. K. Sehaper, R. B. Wehrspohn, U. Gösele, and J. H. Wendorff, "Palladium Nanotubes with Tailored Wall Morphologies," Adv. Mater., 15, 706-9 (2003).
25. 3 Thin Films by a Thermal Decomposition of Water-Based Solutions," Thin Solid Films, 311, 128-32 (1997).
26. 3 on Si Substrates by a Modified Metalorganic Decomposition Technique," Appl. Surf. Sci., 171, 68-70 (2001).
27. 2/Si Substrates," J. Mater. Res., 10, 1508-15 (1995).
28. 3 Film Electrodes by a Simple Chemical Solution Deposition Technique for Integrated Ferroelectric Thin Film Devices," J. Phys. D: Appl. Phys., 36, 1217-21 (2003).
29. S. Trolier-McKinstry, J. Chen, K. Vedam, and R. E. Newnham, "In Situ Annealing Studies of Sol-Gel Ferroelectric Thin Films by Spectroscopic Ellipsomelry," J. Am. Ceram. Soc., 78, 1907-13 (1995).
30. L.-P. Wang, R. Wolf, Q. Zhou, S. Trolier-McKinstry, and R. J. Davis, "Wetetch Patterning of Lead Zirconate Titanate (PZT) Thick Films for Microelectromechanical Systems (MEMS) Applications"; pp. EE5.39. in Materials Research Society Symposium Proceedings. Vol. 657, Boston, 2001.