3 keV Ar scattering from unreconstructed Si(1 0 0) at grazing incidence: Molecular dynamics simulation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 247, Issue 2, 2006, Pages 244-253

  Gou, F ^a   Gleeson, M A ^b   Villette, J ^a,c   Kleyn, A W ^a,b  

^a LEIDEN UNIVERSITY   (Netherlands)

^b FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

^c Unaxis Corporation   (France)

Author keywords

Atom surface interaction; Molecular dynamics simulation; Silicon

Indexed keywords

ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ENERGY DISSIPATION; MOLECULAR DYNAMICS; PLASMA COLLISION PROCESSES; SILICON;

ATOM-SURFACE INTERACTION; AZIMUTHAL SCATTERING ANGLE; GRAZING SCATTERING; MOLECULAR DYNAMICS SIMULATION;

ARGON;

EID: 33747456698     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.02.009     Document Type: Article

References (40)

1. Rabalais J.W. Low Energy Ion-Surface Interaction (1993), Wiley, New York
2. Brako R., and Newns D.M. Rep. Prog. Phys. 52 (1989) 655
3. Niehus H., Heiland W., and Taglauer E. Surf. Sci. Rep. 17 (1993) 213
4. Los J., and Geerlings J.J.C. Phys. Rep. 190 (1990) 133
5. Gauyacq J.P., and Borisov A.G. J. Phys.: Condens. Matter 10 (1998) 6585
6. Kasi S.R., Kang H., Sass C.S., and Rabalais J.W. Surf. Sci. Rep. 10 (1989) 1
7. Maazouz M., Guillemot L., Esaulov V.A., and O'Connor D.J. Surf. Sci. 398 (1998) 49
8. Graves D.B., and Kushner M.J. J. Vac. Sci. Technol. A 21 (2003) S152
9. Hird B., Armstrong R.A., and Gauthier P. Phys. Rev. A 49 (1994) 1107
10. Xu F., Manico G., Ascione F., Bonanno A., Oliva A., and Baragiola R.A. Phys. Rev. A 57 (1998) 1096
11. Souda R., Yamamoto K., Hayami W., Aizawa T., and Ishizawa Y. Phys. Rev. Lett. 75 (1995) 3552
12. Barbara A.-S. J. Appl. Phys. 94 (2003) 4776
13. Cameron F.A., and David B.G. J. Appl. Phys. 86 (1999) 5938
14. Bernhard T., Pfandzelter R., and Winter H. Surf. Sci. 543 (2003) 36
15. Yutong W., Eric G., and Theodore E.M. J. Vac. Sci. Technol. A 14 (1996) 2554
16. Winter H. Phys. Rep. 367 (2002) 387
17. Winter H., and Schu{combining double acute accent}ller A. Nucl. Instr. and Meth. B 232 (2005) 165
18. Robin A., Heiland W., Jensen J., Juaristi J.I., and Arnau A. Phys. Rev. A 64 (2001) 052901
19. Fang Z.L., Lau W.M., and Rabalais J.W. Surf. Sci. 581 (2005) 1
20. Kleyn A.W., and Horn T.C.M. Phys. Rep. 199 (1991) 192
21. Lindhard J. J. Phys. Lett. 12 (1964) 126
22. Gemmell D.S. Rev. Mod. Phys. 46 (1974) 129
23. F. Gou, M.A. Gleeson, A.W. Kleyn, Vacuum, in press.
24. Schram D.C. Nucl. Instr. and Meth. B 139 (1998) 136
25. Mark T.R., and Ian M.T. Phys. Rev. B 9 (1974) 5008
26. Tenner A.D., Gillen K.T., Horn T.C.M., Los J., and Kleyn A.W. Phys. Rev. Lett. 52 (1984) 2183
27. Tenner A.D., Saxon R.P., Gillen K.T., Harrison D.E., Horn T.C.M., and Kleyn A.W. Surf. Sci. 172 (1986) 121
28. Tenner A.D., Gillen K.T., and Kleyn A.W. Nucl. Instr. and Meth. B 17 (1986) 108
29. Danailov D., Gärtner K., and Caro A. Nucl. Instr. and Meth. B 153 (1999) 191
30. Danailov D., Rechtien J.H., and Snowdon K.J. Surf. Sci. 259 (1991) 359
31. Allen M.P., and Tildesley D.J. Computer Simulation of Liquids (1987), Oxford Science Publications, New York
32. Moliere G. Z. Naturforsch A2 (1947) 133
33. Feil H., Dieleman J., and Garrison B.J. J. Appl. Phys. 74 (1993) 1303
34. Barone M.E., and Graves D.B. J. Appl. Phys. 77 (1995) 1263
35. Torrens I.M. Interatomic Potentials (1972), Academic Press, New York
36. O'Connor D.J., and Biersack J.P. Nucl. Instr. and Meth. B 15 (1986) 14
37. Tersoff J. Phys. Rev. Lett. 56 (1986) 632
38. Lahaye R.J.W.E., Kleyn A.W., Stolte S., and Holloway S. Surf. Sci. 338 (1995) 169
39. Swope W., Andersen H., Berens P., and Wilson K. J. Chem. Phys. 76 (1982) 637
40. Horn T.C.M., Kleyn A.W., and Gislason E.A. Chem. Phys. 127 (1988) 81