Influence of the precursor materials on the process of aluminium induced crystallisation of a-Si and a-Si:H

Thin Solid Films

Volumn 511-512, Issue , 2006, Pages 381-384

  Grigorov, V ^a   Angelov, O ^a   Sendova Vassileva, M ^a   Dimova Malinovska, D ^a  

^a BULGARIAN ACADEMY OF SCIENCES   (Bulgaria)

Author keywords

a Si:H; AIC; Hydrogen content; poly Si

Indexed keywords

ALUMINUM; AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; DEPOSITION; MAGNETRON SPUTTERING; POLYSILICON; RAMAN SPECTROSCOPY;

ALUMINIUM-INDUCED CRYSTALLISATION (AIC); AMORPHOUS SILICON FILMS; HYDROGEN CONCENTRATION; HYDROGEN CONTENT;

THIN FILMS;

EID: 33747431839     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.140     Document Type: Article

References (17)

1. Nast O., and Wenham S.R. J. Appl. Phys. 88 (2000) 124
2. Nast O., and Hartmann A.J. J. Appl. Phys. 88 (2000) 716
3. Ito T., Fukushima H., and Yamaguchi M. Sol. Energy Mater. Sol. Cells 83 (2004) 91
4. Doi A. Thin Solid Films 451-452 (2004) 485
5. Ishikawa Y., Nakamura A., Uraoka Y., and Fuyuki T. Jpn. J. Appl. Phys. 43 (2004) 877
6. Sieber I., Schneider R., Doerfel I., Schubert-Bischoff P., Gall S., and Fuhs W. Thin Solid Films 427 (2003) 298
7. Schneider J., Klein J., Muske M., Gall S., and Fuhs W. J. Non-Cryst. Solids 338-340 (2004) 127
8. Pihan E., Slaoui A., Roca I Cabarrocas P., and Fosca A. Thin Solid Films 451-452 (2004) 328
9. Ornaghi C., Beaucarne G., Poortmans J., Nijs J., and Mertens R. Thin Solid Films 451-452 (2004) 476
10. Klein J., Schneider J., Muske M., Gall S., and Fuhs W. Thin Solid Films 451-452 (2004) 481
11. Dimova-Malinovska D., Angelov O., Sendova-Vassileva M., Grigorov V., and Kamenova M. Proceedings of 19th EPVSEC, Paris (2004) 371
12. Grigorov V., Dimova-Malinovska D., Angelov O., Sendova-Vassileva M., and Kamenova M. In: Balabanova E., and Dragieva I. (Eds). Proceedings of Nanoscience and Nanotechnology (2005), Heron Press 37
13. Sze S.M. VLSI Technology (1984), McGraw-Hill, Singapore 366
14. Fauchet F.M., and Campbell I.H. Crit. Rev. Solid State Mater. Sci. 14 (1988) S79
15. Igbal Z., and Veprek S. J. Phys., C 15 (1982) 377
16. Boultadakis S., Logothetidis S., Ves S., and Kircher J. J. Appl. Phys. 73 (1993) 914
17. Janssen R., Janotta A., Dimova-Malinovska D., and Stutzmann M. Phys. Rev., B 60 (1999) 13561