Preparation of thin polycrystalline silicon films on glass by aluminium-induced crystallisation - An electron microscopy study

Thin Solid Films

Volumn 427, Issue 1-2, 2003, Pages 298-302

  Sieber, I ^a   Schneider, R ^b   Doerfel, I ^c   Schubert Bischoff, P ^a   Gall, S ^a   Fuhs, W ^a  

^a HAHN MEITNER INSTITUT   (Germany)

^b HUMBOLDT UNIVERSITY   (Germany)

^c BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

Crystallisation; Electron energy loss spectroscopy; Electron microscopy; Polycrystalline silicon

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CRYSTALLIZATION; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON MICROSCOPY; GLASS; INTERFACES (MATERIALS); NUCLEATION; POLYSILICON; TRANSMISSION ELECTRON MICROSCOPY;

CORUNDUM STRUCTURES;

THIN FILMS;

EID: 0037416671     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)01154-9     Document Type: Conference Paper

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