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Journal of Photopolymer Science and Technology

Volumn 19, Issue 3, 2006, Pages 367-372

Supercritical-carbon-dioxide solubility characteristics of polyphenols and polyphenol derivatives

(3) Shiraishi, Hiroshi a Yamamoto, Jiro a Sakamizu, Toshio a

a HITACHI LTD (Japan)

Author keywords

Carboxylic acid; Carboxylic acid ester; Development; Hydrogen bonding interaction; Polyphenol; Resist; Supercritical carbon dioxide

Indexed keywords

EID: 33747411262 PISSN: 09149244 EISSN: 13496336 Source Type: Journal
DOI: 10.2494/photopolymer.19.367 Document Type: Article

Times cited : (3)

References (16)

1
- 0027857033
- T. Tanaka, M. Morigami, and N. Atoda, Jpn. J. Appl. Phys. 32 (1993) 6059.
- (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 6059
- Tanaka, T.¹ Morigami, M.² Atoda, N.³

2
- 0034314806
- H. Namatsu, J. Vac. Sci. Technol. B 18 (2000) 3308.
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 3308
- Namatsu, H.¹

3
- 0034318269
- D. L. Goldfarb, J. J. de Pablo, P. F. Nealey, J. P. Simons, W. M. Moreau, and M. Angelpoulos, J. Vac. Sci. Technol. B 18 (2000) 3313.
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 3313
- Goldfarb, D.L.¹ De Pablo, J.J.² Nealey, P.F.³ Simons, J.P.⁴ Moreau, W.M.⁵ Angelpoulos, M.⁶

4
- 0029214175
- P. Gallagher-Wetmore, G. M. Wallraff, and R. D. Allen, Proc. SPIE 2438 (1995) 694.
- (1995) Proc. SPIE , vol.2438 , pp. 694
- Gallagher-Wetmore, P.¹ Wallraff, G.M.² Allen, R.D.³

5
- 0028499491
- Z. Guan and J. M. DeSimone, Macromolecules 27 (1994) 5527.
- (1994) Macromolecules , vol.27 , pp. 5527
- Guan, Z.¹ DeSimone, J.M.²

6
- 0033803158
- N. Sundararajan, S. Yang, K. Ogino, S. Valiyaveettil, J. Wang, X. Zhou, C. K. Ober, Chem. Matter. 12 (2000) 41.
- (2000) Chem. Matter. , vol.12 , pp. 41
- Sundararajan, N.¹ Yang, S.² Ogino, K.³ Valiyaveettil, S.⁴ Wang, J.⁵ Zhou, X.⁶ Ober, C.K.⁷

7
- 0141723292
- M. K. Boggiano and J. M. DeSimone, Proc. SPIE 5039 (2003) 650.
- (2003) Proc. SPIE , vol.5039 , pp. 650
- Boggiano, M.K.¹ Desimone, J.M.²

8
- 0027839360
- T. Yoshimura, H. Shiraishi, J. Yamamoto and S. Okazaki, Jpn. J. Appl. Phys. 32 (1993) 6065.
- (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 6065
- Yoshimura, T.¹ Shiraishi, H.² Yamamoto, J.³ Okazaki, S.⁴

9
- 11744364248
- H. Namatsu, M. Nagase, T. Yamaguchi, K. Yamazaki, and K. Kurihara, J. Vac. Sci. Technol. B 16 (1998) 3315.
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3315
- Namatsu, H.¹ Nagase, M.² Yamaguchi, T.³ Yamazaki, K.⁴ Kurihara, K.⁵

10
- 0342986805
- S. Uchino, J. Yamamoto, S. Migitaka, K. Kojima, M. Hashimoto, and H. Shiraishi, J. Vac. Sci. Technol. B 16 (1998) 3684.
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3684
- Uchino, S.¹ Yamamoto, J.² Migitaka, S.³ Kojima, K.⁴ Hashimoto, M.⁵ Shiraishi, H.⁶

11
- 3142631823
- T. Hirayama, D. Shiono, H. Hada, J.Onodera, and M. Ueda, J. Photopofym. Sci. Technol., 17 (2004) 435.
- (2004) J. Photopofym. Sci. Technol. , vol.17 , pp. 435
- Hirayama, T.¹ Shiono, D.² Hada, H.³ Onodera, J.⁴ Ueda, M.⁵

12
- 24644484214
- at the aural presentation of the paper: S. W. Chang, D. Yang, J. Dai, N. Felix, D. Bratton, K. Tsuchiya, Y-J. Kwark, J-P. Bravo, C.K. Ober, Proc. SPIE 5753 (2005) 1.
- (2005) Proc. SPIE , vol.5753 , pp. 1
- Chang, S.W.¹ Yang, D.² Dai, J.³ Felix, N.⁴ Bratton, D.⁵ Tsuchiya, K.⁶ Kwark, Y.-J.⁷ Bravo, J.-P.⁸ Ober, C.K.⁹

13
- 0022812212
- H. Ito, J. Polymer Sci., Part A: Polymer Chem. Ed., 24 (1986) 2971.
- (1986) J. Polymer Sci., Part A: Polymer Chem. Ed. , vol.24 , pp. 2971
- Ito, H.¹

14
- 0009434993
- Y. Onishi, H. Niki, Y. Kobayashi, R. H. Hayase, N. Oyasato, and O. Sasaki, J. Photopolym. Sci. Technol., 4 (1991) 337.
- (1991) J. Photopolym. Sci. Technol. , vol.4 , pp. 337
- Onishi, Y.¹ Niki, H.² Kobayashi, Y.³ Hayase, R.H.⁴ Oyasato, N.⁵ Sasaki, O.⁶

15
- 85047103865
- H. Iimori, Y. Shibasaki, M. Ueda, H. Ishii, J. Photopolymer Sci. Technol. 16 (2003) 685.
- (2003) J. Photopolymer Sci. Technol. , vol.16 , pp. 685
- Iimori, H.¹ Shibasaki, Y.² Ueda, M.³ Ishii, H.⁴

16
- 33747449077
- McGraw-Hill, Chapter 5
- th ed. McGraw-Hill, (1980) Chapter 5, 5-3B.
- (1980) th Ed.
- Pine, S.H.¹ Hendrickson, J.B.² Cram, D.J.³ Hammond, G.S.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.