Mechanism of TiN barrier-metal oxidation in a ferroelectric random access memory

Journal of Materials Research

Volumn 13, Issue 11, 1998, Pages 3265-3269

  Kushida Abdelghafar, Keiko ^a   Torii, Kazuyoshi ^a   Takatani, Shinichiro ^a   Matsui, Yuichi ^a   Fujisaki, Yoshihisa ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; CRYSTALLIZATION; GRAIN BOUNDARIES; HEAT TREATMENT; OXIDATION; OXIDATION RESISTANCE; PLATINUM; RANDOM ACCESS STORAGE; THIN FILMS; TITANIUM NITRIDE; TITANIUM OXIDES; TRANSMISSION ELECTRON MICROSCOPY;

CROSS SECTIONAL IMAGING; OXYGEN DIFFUSION;

FERROELECTRIC MATERIALS;

EID: 0032202897     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1998.0443     Document Type: Article

References (11)

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