Application of electron tomography for semiconductor device analysis

AIP Conference Proceedings

Volumn 817, Issue , 2006, Pages 223-228

  Kubel C ^a,b   Kubel J ^d   Kujawa, S ^b   Luo, J S ^c   Lo, H M ^c   Russell, J D ^c  

^a FRAUNHOFER INSTITUTE FOR MANUFACTURING TECHNOLOGY AND ADVANCED MATERIALS IFAM   (Germany)

^b Thermo Fisher Scientific   (United States)

^c Inotera Memories   (Taiwan)

^d NONE

Author keywords

3D imaging; DRAM; Electron tomography; Semiconductor devices; VIA

Indexed keywords

EID: 33746862365     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2173554     Document Type: Conference Paper

References (9)

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