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Volumn 335, Issue , 2006, Pages 227-232
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The ferroelectric properties of (Na0.5K0.5)NbO 3 thin films fabricated by rf-magnetron sputtering
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Author keywords
(Na,K)NbO3 thin film; Ferroelectricity; FRAM
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Indexed keywords
ANNEALING;
FERROELECTRIC CERAMICS;
LEAKAGE CURRENTS;
MAGNETRON SPUTTERING;
NIOBIUM COMPOUNDS;
RANDOM ACCESS STORAGE;
SILICON;
BIPOLAR SQUARE PULSES;
FERROELECTRIC RANDOM ACCESS MEMORY (FRAM);
RADIO FREQUENCY MAGNETRON SPUTTERING;
FERROELECTRIC THIN FILMS;
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EID: 33746784214
PISSN: 00150193
EISSN: 15635112
Source Type: Conference Proceeding
DOI: 10.1080/00150190600691460 Document Type: Conference Paper |
Times cited : (13)
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References (19)
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